JPS5295978A - Mask fitting device of semiconductor substrate - Google Patents

Mask fitting device of semiconductor substrate

Info

Publication number
JPS5295978A
JPS5295978A JP1267376A JP1267376A JPS5295978A JP S5295978 A JPS5295978 A JP S5295978A JP 1267376 A JP1267376 A JP 1267376A JP 1267376 A JP1267376 A JP 1267376A JP S5295978 A JPS5295978 A JP S5295978A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
fitting device
opening
substrate
mask fitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1267376A
Other languages
Japanese (ja)
Inventor
Takami Sakota
Hidenori Seki
Kuniya Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1267376A priority Critical patent/JPS5295978A/en
Publication of JPS5295978A publication Critical patent/JPS5295978A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent contamination of a substrate by providing an opening for adsorbing substrate and an opening for separating substrate on the substrate mount and connectting the opening for adsorbing to a pressure reducing source through a filter, and connection the opening for separating to a high pressure source.
COPYRIGHT: (C)1977,JPO&Japio
JP1267376A 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate Pending JPS5295978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267376A JPS5295978A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267376A JPS5295978A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5295978A true JPS5295978A (en) 1977-08-12

Family

ID=11811880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267376A Pending JPS5295978A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5295978A (en)

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