JPS53103194A - Thin film resistor unit with resistor for compensating resistance temperature coefficient - Google Patents

Thin film resistor unit with resistor for compensating resistance temperature coefficient

Info

Publication number
JPS53103194A
JPS53103194A JP1625377A JP1625377A JPS53103194A JP S53103194 A JPS53103194 A JP S53103194A JP 1625377 A JP1625377 A JP 1625377A JP 1625377 A JP1625377 A JP 1625377A JP S53103194 A JPS53103194 A JP S53103194A
Authority
JP
Japan
Prior art keywords
resistor
thin film
temperature coefficient
resistance temperature
compensating resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1625377A
Other languages
Japanese (ja)
Inventor
Akihisa Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1625377A priority Critical patent/JPS53103194A/en
Publication of JPS53103194A publication Critical patent/JPS53103194A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To promote an improvement of temperature characteristic for the circuit, with a temperature reliance of the resistance value eliminated, by constructing a resistance layer for compensating resistance-temperature, having a positive resistance-temperature coefficient, partially in a resistor unit layer of tantalum nitride thin film.
COPYRIGHT: (C)1978,JPO&Japio
JP1625377A 1977-02-18 1977-02-18 Thin film resistor unit with resistor for compensating resistance temperature coefficient Pending JPS53103194A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1625377A JPS53103194A (en) 1977-02-18 1977-02-18 Thin film resistor unit with resistor for compensating resistance temperature coefficient

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1625377A JPS53103194A (en) 1977-02-18 1977-02-18 Thin film resistor unit with resistor for compensating resistance temperature coefficient

Publications (1)

Publication Number Publication Date
JPS53103194A true JPS53103194A (en) 1978-09-08

Family

ID=11911390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1625377A Pending JPS53103194A (en) 1977-02-18 1977-02-18 Thin film resistor unit with resistor for compensating resistance temperature coefficient

Country Status (1)

Country Link
JP (1) JPS53103194A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element
WO2005020250A3 (en) * 2003-06-02 2005-05-06 Ibm Method of fabrication of thin film resistor with 0 ctr

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element
WO2005020250A3 (en) * 2003-06-02 2005-05-06 Ibm Method of fabrication of thin film resistor with 0 ctr

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