JPS53105366A - Manufacture for semiconductor element substrate - Google Patents
Manufacture for semiconductor element substrateInfo
- Publication number
- JPS53105366A JPS53105366A JP1924677A JP1924677A JPS53105366A JP S53105366 A JPS53105366 A JP S53105366A JP 1924677 A JP1924677 A JP 1924677A JP 1924677 A JP1924677 A JP 1924677A JP S53105366 A JPS53105366 A JP S53105366A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor element
- element substrate
- substrate
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title 1
- 239000013078 crystal Substances 0.000 abstract 2
- 230000008018 melting Effects 0.000 abstract 2
- 238000002844 melting Methods 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000006104 solid solution Substances 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To manufacture the substrate crystal of high quality, by moving the substrate which forms no compound or solid solution with the semicondcutor crystal in melting condition and is coated with harmless metal of low melting point, in a given speed.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1924677A JPS53105366A (en) | 1977-02-25 | 1977-02-25 | Manufacture for semiconductor element substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1924677A JPS53105366A (en) | 1977-02-25 | 1977-02-25 | Manufacture for semiconductor element substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53105366A true JPS53105366A (en) | 1978-09-13 |
Family
ID=11994043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1924677A Pending JPS53105366A (en) | 1977-02-25 | 1977-02-25 | Manufacture for semiconductor element substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53105366A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57162328A (en) * | 1981-03-16 | 1982-10-06 | Atlantic Richfield Co | Isolation valve |
| JPS57162422A (en) * | 1981-03-16 | 1982-10-06 | Atlantic Richfield Co | Substrate temperature adjusting device |
| JPS57162423A (en) * | 1981-03-16 | 1982-10-06 | Atlantic Richfield Co | Continuously depositing device |
| JPS583223A (en) * | 1981-06-30 | 1983-01-10 | Toshiba Corp | Manufacture of semiconductor device |
| JPS59177922A (en) * | 1983-03-14 | 1984-10-08 | エナージー・コンバーション・デバイセス・インコーポレーテッド | Process gas introducing and feeding system |
-
1977
- 1977-02-25 JP JP1924677A patent/JPS53105366A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57162328A (en) * | 1981-03-16 | 1982-10-06 | Atlantic Richfield Co | Isolation valve |
| JPS57162422A (en) * | 1981-03-16 | 1982-10-06 | Atlantic Richfield Co | Substrate temperature adjusting device |
| JPS57162423A (en) * | 1981-03-16 | 1982-10-06 | Atlantic Richfield Co | Continuously depositing device |
| JPH02216819A (en) * | 1981-03-16 | 1990-08-29 | Energy Conversion Devices Inc | Separation valve |
| JPH02127028U (en) * | 1981-03-16 | 1990-10-19 | ||
| JPS583223A (en) * | 1981-06-30 | 1983-01-10 | Toshiba Corp | Manufacture of semiconductor device |
| JPS59177922A (en) * | 1983-03-14 | 1984-10-08 | エナージー・コンバーション・デバイセス・インコーポレーテッド | Process gas introducing and feeding system |
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