JPS5310977A - Thin film forming apparatus - Google Patents

Thin film forming apparatus

Info

Publication number
JPS5310977A
JPS5310977A JP8509476A JP8509476A JPS5310977A JP S5310977 A JPS5310977 A JP S5310977A JP 8509476 A JP8509476 A JP 8509476A JP 8509476 A JP8509476 A JP 8509476A JP S5310977 A JPS5310977 A JP S5310977A
Authority
JP
Japan
Prior art keywords
thin film
forming apparatus
film forming
feeding
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8509476A
Other languages
Japanese (ja)
Inventor
Hideo Matsuzaki
Shizuo Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8509476A priority Critical patent/JPS5310977A/en
Publication of JPS5310977A publication Critical patent/JPS5310977A/en
Pending legal-status Critical Current

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  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PURPOSE: To form a uniform thin film bya dipping process by temperature-controlling coating solution, feeding the solution into a coating bath and feeding cleaned air.
COPYRIGHT: (C)1978,JPO&Japio
JP8509476A 1976-07-19 1976-07-19 Thin film forming apparatus Pending JPS5310977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8509476A JPS5310977A (en) 1976-07-19 1976-07-19 Thin film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8509476A JPS5310977A (en) 1976-07-19 1976-07-19 Thin film forming apparatus

Publications (1)

Publication Number Publication Date
JPS5310977A true JPS5310977A (en) 1978-01-31

Family

ID=13849008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8509476A Pending JPS5310977A (en) 1976-07-19 1976-07-19 Thin film forming apparatus

Country Status (1)

Country Link
JP (1) JPS5310977A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5880157A (en) * 1994-02-08 1999-03-09 Yissum Research Development Company Of The Hebrew University Of Jerusalem Derivatives of tetramethylcyclopropane

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5880157A (en) * 1994-02-08 1999-03-09 Yissum Research Development Company Of The Hebrew University Of Jerusalem Derivatives of tetramethylcyclopropane

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