JPS53129964A - Method and device for inserting and taking out of heat treatment jig - Google Patents

Method and device for inserting and taking out of heat treatment jig

Info

Publication number
JPS53129964A
JPS53129964A JP4445677A JP4445677A JPS53129964A JP S53129964 A JPS53129964 A JP S53129964A JP 4445677 A JP4445677 A JP 4445677A JP 4445677 A JP4445677 A JP 4445677A JP S53129964 A JPS53129964 A JP S53129964A
Authority
JP
Japan
Prior art keywords
heat treatment
taking out
treatment jig
jig
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4445677A
Other languages
Japanese (ja)
Other versions
JPS623571B2 (en
Inventor
Masakuni Akiba
Hiroto Nagatomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4445677A priority Critical patent/JPS53129964A/en
Publication of JPS53129964A publication Critical patent/JPS53129964A/en
Publication of JPS623571B2 publication Critical patent/JPS623571B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatments In General, Especially Conveying And Cooling (AREA)

Abstract

PURPOSE: To prevent the production of dust and temperatue change in furnace by putting jig into and out from the heat treatment furnace through a rectangular movement path.
COPYRIGHT: (C)1978,JPO&Japio
JP4445677A 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig Granted JPS53129964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4445677A JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4445677A JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP58222011A Division JPS59130420A (en) 1983-11-28 1983-11-28 Inserting and drawing-out equipment of thermal treatment jig
JP58222012A Division JPS59130421A (en) 1983-11-28 1983-11-28 Inserting and drawing-out jig of thermal treatment jig
JP59278882A Division JPS60167323A (en) 1984-12-28 1984-12-28 Lateral type semiconductor wafer batch treatment device
JP59278881A Division JPS60167322A (en) 1984-12-28 1984-12-28 Heat treatment of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS53129964A true JPS53129964A (en) 1978-11-13
JPS623571B2 JPS623571B2 (en) 1987-01-26

Family

ID=12691982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4445677A Granted JPS53129964A (en) 1977-04-20 1977-04-20 Method and device for inserting and taking out of heat treatment jig

Country Status (1)

Country Link
JP (1) JPS53129964A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54157080A (en) * 1978-05-31 1979-12-11 Mitsubishi Electric Corp Semiconductor device
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS57178440U (en) * 1981-05-06 1982-11-11
JPS5885523A (en) * 1981-11-17 1983-05-21 Nec Home Electronics Ltd Semiconductor manufacturing apparatus
US4440538A (en) * 1981-12-30 1984-04-03 Atomel Products Corporation Apparatus for loading and unloading a furnace
JPS59154017A (en) * 1983-02-22 1984-09-03 Mitsubishi Electric Corp Furnace paddle for semiconductor wafer
JPS6079714A (en) * 1983-10-06 1985-05-07 Rohm Co Ltd diffusion furnace
JPS6095920A (en) * 1983-10-05 1985-05-29 アドヴアンスト　セミコンダクター　マテイリアルズ　アメリカ　インコーポレーテツド Article handling device and method
JPS6078137U (en) * 1983-11-02 1985-05-31 信越石英株式会社 Wafer transfer device
JPS60140817A (en) * 1983-12-28 1985-07-25 Fujitsu Ltd Manufacture of semiconductor device
JPS60167322A (en) * 1984-12-28 1985-08-30 Hitachi Ltd Heat treatment of semiconductor wafer
JPS6173322A (en) * 1984-09-18 1986-04-15 Toshiba Corp Heat treating furnace
JPS61184822A (en) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Method for heat treatment
JPS61184821A (en) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Heat treatment equipment
US4620832A (en) * 1984-03-07 1986-11-04 Motion Manufacturing, Inc. Furnace loading system
US4952108A (en) * 1988-02-20 1990-08-28 Foss Heraeus Analysensysteme Gmbh Apparatus for automatically feeding a sequence of crucibles to a test oven

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54157080A (en) * 1978-05-31 1979-12-11 Mitsubishi Electric Corp Semiconductor device
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS57178440U (en) * 1981-05-06 1982-11-11
JPS5885523A (en) * 1981-11-17 1983-05-21 Nec Home Electronics Ltd Semiconductor manufacturing apparatus
US4440538A (en) * 1981-12-30 1984-04-03 Atomel Products Corporation Apparatus for loading and unloading a furnace
JPS59154017A (en) * 1983-02-22 1984-09-03 Mitsubishi Electric Corp Furnace paddle for semiconductor wafer
JPS6095920A (en) * 1983-10-05 1985-05-29 アドヴアンスト　セミコンダクター　マテイリアルズ　アメリカ　インコーポレーテツド Article handling device and method
JPS6079714A (en) * 1983-10-06 1985-05-07 Rohm Co Ltd diffusion furnace
JPS6078137U (en) * 1983-11-02 1985-05-31 信越石英株式会社 Wafer transfer device
JPS60140817A (en) * 1983-12-28 1985-07-25 Fujitsu Ltd Manufacture of semiconductor device
US4620832A (en) * 1984-03-07 1986-11-04 Motion Manufacturing, Inc. Furnace loading system
JPS6173322A (en) * 1984-09-18 1986-04-15 Toshiba Corp Heat treating furnace
JPS60167322A (en) * 1984-12-28 1985-08-30 Hitachi Ltd Heat treatment of semiconductor wafer
JPS61184822A (en) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Method for heat treatment
JPS61184821A (en) * 1985-09-30 1986-08-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Heat treatment equipment
US4952108A (en) * 1988-02-20 1990-08-28 Foss Heraeus Analysensysteme Gmbh Apparatus for automatically feeding a sequence of crucibles to a test oven

Also Published As

Publication number Publication date
JPS623571B2 (en) 1987-01-26

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