JPS53129971A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53129971A
JPS53129971A JP4530177A JP4530177A JPS53129971A JP S53129971 A JPS53129971 A JP S53129971A JP 4530177 A JP4530177 A JP 4530177A JP 4530177 A JP4530177 A JP 4530177A JP S53129971 A JPS53129971 A JP S53129971A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
sio
films
limiting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4530177A
Other languages
Japanese (ja)
Inventor
Takashi Osone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4530177A priority Critical patent/JPS53129971A/en
Publication of JPS53129971A publication Critical patent/JPS53129971A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To make MOS devices of high density and high performance by limiting and forming channel stoppers to the bottom face of SiO2 films.
COPYRIGHT: (C)1978,JPO&Japio
JP4530177A 1977-04-19 1977-04-19 Production of semiconductor device Pending JPS53129971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4530177A JPS53129971A (en) 1977-04-19 1977-04-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4530177A JPS53129971A (en) 1977-04-19 1977-04-19 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53129971A true JPS53129971A (en) 1978-11-13

Family

ID=12715484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4530177A Pending JPS53129971A (en) 1977-04-19 1977-04-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53129971A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003012850A1 (en) * 2001-07-26 2003-02-13 Motorola, Inc. Selective metal oxide removal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003012850A1 (en) * 2001-07-26 2003-02-13 Motorola, Inc. Selective metal oxide removal
US6818493B2 (en) 2001-07-26 2004-11-16 Motorola, Inc. Selective metal oxide removal performed in a reaction chamber in the absence of RF activation

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