JPS5314574A - Clean bench - Google Patents

Clean bench

Info

Publication number
JPS5314574A
JPS5314574A JP8815776A JP8815776A JPS5314574A JP S5314574 A JPS5314574 A JP S5314574A JP 8815776 A JP8815776 A JP 8815776A JP 8815776 A JP8815776 A JP 8815776A JP S5314574 A JPS5314574 A JP S5314574A
Authority
JP
Japan
Prior art keywords
clean
clean bench
air
chamber
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8815776A
Other languages
Japanese (ja)
Inventor
Kinya Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8815776A priority Critical patent/JPS5314574A/en
Publication of JPS5314574A publication Critical patent/JPS5314574A/en
Pending legal-status Critical Current

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  • Ventilation (AREA)

Abstract

PURPOSE: To facilitate putting the hand into and out from a clean chamber and hold high cleanliness by providing a clean air nozzle part in the upper part of the opening of the clean chamber and flowing the clean air of the velocity higher than the velocity of the clean air to be flown in the clean chamber thereby forming an air curtain layer.
COPYRIGHT: (C)1978,JPO&Japio
JP8815776A 1976-07-26 1976-07-26 Clean bench Pending JPS5314574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8815776A JPS5314574A (en) 1976-07-26 1976-07-26 Clean bench

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8815776A JPS5314574A (en) 1976-07-26 1976-07-26 Clean bench

Publications (1)

Publication Number Publication Date
JPS5314574A true JPS5314574A (en) 1978-02-09

Family

ID=13935077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8815776A Pending JPS5314574A (en) 1976-07-26 1976-07-26 Clean bench

Country Status (1)

Country Link
JP (1) JPS5314574A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57166339U (en) * 1981-04-13 1982-10-20
JPS59154015A (en) * 1983-02-23 1984-09-03 Hitachi Ltd Clean tunnel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57166339U (en) * 1981-04-13 1982-10-20
JPS59154015A (en) * 1983-02-23 1984-09-03 Hitachi Ltd Clean tunnel

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