JPS532085A - Manufacture of mis-type semiconductor device - Google Patents

Manufacture of mis-type semiconductor device

Info

Publication number
JPS532085A
JPS532085A JP7614376A JP7614376A JPS532085A JP S532085 A JPS532085 A JP S532085A JP 7614376 A JP7614376 A JP 7614376A JP 7614376 A JP7614376 A JP 7614376A JP S532085 A JPS532085 A JP S532085A
Authority
JP
Japan
Prior art keywords
semiconductor device
mis
manufacture
type semiconductor
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7614376A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Kazutoshi Miyao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7614376A priority Critical patent/JPS532085A/en
Publication of JPS532085A publication Critical patent/JPS532085A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain a semiconductor device featuring a high integration performance, high response velocity and no disconnection by making the electrode window of SiO2 film through removal of Si3N4 film and giving a minute and gentle inclination to the hole wall.
COPYRIGHT: (C)1978,JPO&Japio
JP7614376A 1976-06-28 1976-06-28 Manufacture of mis-type semiconductor device Pending JPS532085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7614376A JPS532085A (en) 1976-06-28 1976-06-28 Manufacture of mis-type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7614376A JPS532085A (en) 1976-06-28 1976-06-28 Manufacture of mis-type semiconductor device

Publications (1)

Publication Number Publication Date
JPS532085A true JPS532085A (en) 1978-01-10

Family

ID=13596764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7614376A Pending JPS532085A (en) 1976-06-28 1976-06-28 Manufacture of mis-type semiconductor device

Country Status (1)

Country Link
JP (1) JPS532085A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363121A (en) * 1976-11-17 1978-06-06 Fujitsu Ltd Typewriter
JPS60166560U (en) * 1984-04-12 1985-11-05 アルプス電気株式会社 thermal printer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5363121A (en) * 1976-11-17 1978-06-06 Fujitsu Ltd Typewriter
JPS60166560U (en) * 1984-04-12 1985-11-05 アルプス電気株式会社 thermal printer

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