JPS5338980A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5338980A
JPS5338980A JP11307576A JP11307576A JPS5338980A JP S5338980 A JPS5338980 A JP S5338980A JP 11307576 A JP11307576 A JP 11307576A JP 11307576 A JP11307576 A JP 11307576A JP S5338980 A JPS5338980 A JP S5338980A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
sio
sharp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11307576A
Other languages
Japanese (ja)
Inventor
Takeshi Uryu
Manabu Matsuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11307576A priority Critical patent/JPS5338980A/en
Publication of JPS5338980A publication Critical patent/JPS5338980A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To obtain a highly reliable ohmic electrode by ensuring a good adhesion property through coating of the photo resist film after removing the glass powder grains on SiO2 film and by making a sharp and minute electrode window.
COPYRIGHT: (C)1978,JPO&Japio
JP11307576A 1976-09-22 1976-09-22 Manufacture of semiconductor device Pending JPS5338980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11307576A JPS5338980A (en) 1976-09-22 1976-09-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11307576A JPS5338980A (en) 1976-09-22 1976-09-22 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5338980A true JPS5338980A (en) 1978-04-10

Family

ID=14602837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11307576A Pending JPS5338980A (en) 1976-09-22 1976-09-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5338980A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50117569A (en) * 1974-02-27 1975-09-13
JPS53118809U (en) * 1977-02-28 1978-09-21
JPS5577454U (en) * 1978-11-21 1980-05-28

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50117569A (en) * 1974-02-27 1975-09-13
JPS53118809U (en) * 1977-02-28 1978-09-21
JPS5577454U (en) * 1978-11-21 1980-05-28

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