JPS5321902A - Formation of carbonized protective film for magnetic recording medium - Google Patents

Formation of carbonized protective film for magnetic recording medium

Info

Publication number
JPS5321902A
JPS5321902A JP9635976A JP9635976A JPS5321902A JP S5321902 A JPS5321902 A JP S5321902A JP 9635976 A JP9635976 A JP 9635976A JP 9635976 A JP9635976 A JP 9635976A JP S5321902 A JPS5321902 A JP S5321902A
Authority
JP
Japan
Prior art keywords
protective film
formation
recording medium
magnetic recording
carbonized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9635976A
Other languages
English (en)
Inventor
Takeo Hinobayashi
Masaki Shinohara
Kazuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9635976A priority Critical patent/JPS5321902A/ja
Publication of JPS5321902A publication Critical patent/JPS5321902A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP9635976A 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium Pending JPS5321902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9635976A JPS5321902A (en) 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9635976A JPS5321902A (en) 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS5321902A true JPS5321902A (en) 1978-02-28

Family

ID=14162787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9635976A Pending JPS5321902A (en) 1976-08-11 1976-08-11 Formation of carbonized protective film for magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5321902A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136479A (ja) * 1982-10-12 1984-08-06 イギリス国 複合層を生長させる方法
JPS60155668A (ja) * 1984-01-26 1985-08-15 Denki Kagaku Kogyo Kk 磁気記憶媒体表面に炭化水素保護膜を形成する方法
JPS60163248A (ja) * 1984-02-03 1985-08-26 Kyocera Corp 磁気記録素子
US4607193A (en) * 1984-10-10 1986-08-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Textured carbon surfaces on copper by sputtering
FR2682400A1 (fr) * 1991-10-14 1993-04-16 Commissariat Energie Atomique Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche.
US5547767A (en) * 1991-10-14 1996-08-20 Commissariat A L'energie Atomique Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material and process for producing said multilayer material
US5702829A (en) * 1991-10-14 1997-12-30 Commissariat A L'energie Atomique Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136479A (ja) * 1982-10-12 1984-08-06 イギリス国 複合層を生長させる方法
JPS60155668A (ja) * 1984-01-26 1985-08-15 Denki Kagaku Kogyo Kk 磁気記憶媒体表面に炭化水素保護膜を形成する方法
JPS60163248A (ja) * 1984-02-03 1985-08-26 Kyocera Corp 磁気記録素子
US4607193A (en) * 1984-10-10 1986-08-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Textured carbon surfaces on copper by sputtering
FR2682400A1 (fr) * 1991-10-14 1993-04-16 Commissariat Energie Atomique Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche.
US5547767A (en) * 1991-10-14 1996-08-20 Commissariat A L'energie Atomique Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material and process for producing said multilayer material
US5702829A (en) * 1991-10-14 1997-12-30 Commissariat A L'energie Atomique Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material

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