JPS5325367A - Plasma tr eating method and apparatus - Google Patents

Plasma tr eating method and apparatus

Info

Publication number
JPS5325367A
JPS5325367A JP9968676A JP9968676A JPS5325367A JP S5325367 A JPS5325367 A JP S5325367A JP 9968676 A JP9968676 A JP 9968676A JP 9968676 A JP9968676 A JP 9968676A JP S5325367 A JPS5325367 A JP S5325367A
Authority
JP
Japan
Prior art keywords
plasma
eating method
substrate
plasma flow
scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9968676A
Other languages
Japanese (ja)
Inventor
Takashi Tsuchimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9968676A priority Critical patent/JPS5325367A/en
Publication of JPS5325367A publication Critical patent/JPS5325367A/en
Pending legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To enable plasma flow to scan evenly and across the entire surface over a substrate by moving the final coaxial electromagnets for the purpose of plasma transport thereby changing the arrival point of the plasma flow on the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP9968676A 1976-08-23 1976-08-23 Plasma tr eating method and apparatus Pending JPS5325367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9968676A JPS5325367A (en) 1976-08-23 1976-08-23 Plasma tr eating method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9968676A JPS5325367A (en) 1976-08-23 1976-08-23 Plasma tr eating method and apparatus

Publications (1)

Publication Number Publication Date
JPS5325367A true JPS5325367A (en) 1978-03-09

Family

ID=14253911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9968676A Pending JPS5325367A (en) 1976-08-23 1976-08-23 Plasma tr eating method and apparatus

Country Status (1)

Country Link
JP (1) JPS5325367A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma
US4497513A (en) * 1981-09-21 1985-02-05 Tokyo Shibaura Denki Kabushiki Kaisha Locking device for door of cooking apparatus
JPH0391238A (en) * 1989-09-02 1991-04-16 Fuji Electric Co Ltd Plasma device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma
US4497513A (en) * 1981-09-21 1985-02-05 Tokyo Shibaura Denki Kabushiki Kaisha Locking device for door of cooking apparatus
JPH0391238A (en) * 1989-09-02 1991-04-16 Fuji Electric Co Ltd Plasma device

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