JPS5327090A - Secondary ion mass an alyzer - Google Patents

Secondary ion mass an alyzer

Info

Publication number
JPS5327090A
JPS5327090A JP10061976A JP10061976A JPS5327090A JP S5327090 A JPS5327090 A JP S5327090A JP 10061976 A JP10061976 A JP 10061976A JP 10061976 A JP10061976 A JP 10061976A JP S5327090 A JPS5327090 A JP S5327090A
Authority
JP
Japan
Prior art keywords
alyzer
ion mass
secondary ion
lead
performance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10061976A
Other languages
Japanese (ja)
Inventor
Kazunobu Hayakawa
Hiroshi Doi
Susumu Kawase
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10061976A priority Critical patent/JPS5327090A/en
Publication of JPS5327090A publication Critical patent/JPS5327090A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:The performance of a secondary mass analyzer is improved by providing potential applying tubes at least between a lead-out electrode and a charged particle detector and making the potential distribution of this portion controllable.
JP10061976A 1976-08-25 1976-08-25 Secondary ion mass an alyzer Pending JPS5327090A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10061976A JPS5327090A (en) 1976-08-25 1976-08-25 Secondary ion mass an alyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10061976A JPS5327090A (en) 1976-08-25 1976-08-25 Secondary ion mass an alyzer

Publications (1)

Publication Number Publication Date
JPS5327090A true JPS5327090A (en) 1978-03-13

Family

ID=14278845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10061976A Pending JPS5327090A (en) 1976-08-25 1976-08-25 Secondary ion mass an alyzer

Country Status (1)

Country Link
JP (1) JPS5327090A (en)

Similar Documents

Publication Publication Date Title
GB2017939B (en) Monitoring variable voltage by means of an electron beam
GB2017941B (en) Monitoring variable voltage with an electron beam
GB698850A (en) Improvements in and relating to apparatus for separating charged particles of different mass-to-charge ratios
DE3070035D1 (en) Charged particle beam tube and method of operating the same
GB2021789B (en) Monitoring voltage using an electron beam probe
GB1450498A (en) Apparatus for determining the energy of charged particles
JPS5327090A (en) Secondary ion mass an alyzer
SE406140B (en) DEVICE FOR HIGH FREQUENCY FOCUSING OF A PARTICULATE RAY OF ELECTRICALLY CHARGED PARTICLES, WHICH ARE ACCELERATED IN A CYCLOTRON TYPE ACCELERATOR
JPS5436990A (en) Charged particle energy analyzing apparatus
JPS5312389A (en) Mass spectrograph
GB1454641A (en) Device for analysing a surface layer
JPS5326191A (en) Specimen analyzer
JPS51124436A (en) Corona electrification device
JPS5296091A (en) Electrostatic type energy analyzer for charged particles
JPS5374470A (en) Measuring instrument for surface electric potential
JPS5364090A (en) Mass analyzer
JPS5213338A (en) Radioactive ray electrophotography
JPS52127390A (en) Energy analyzer for secondary electron
SU582709A1 (en) Magnetic spectrometer of proton synchrotron secondary particle beam
JPS5523454A (en) Lead auger analyzer
JPS5336292A (en) Analyzer for charged particles
JPS55130050A (en) Cathode ray tube
JPS5326190A (en) Specimen analyzer
GB957117A (en) Improvements relating to mass spectrometers
JPS5765660A (en) Ion beam device