JPS5296091A - Electrostatic type energy analyzer for charged particles - Google Patents

Electrostatic type energy analyzer for charged particles

Info

Publication number
JPS5296091A
JPS5296091A JP1228376A JP1228376A JPS5296091A JP S5296091 A JPS5296091 A JP S5296091A JP 1228376 A JP1228376 A JP 1228376A JP 1228376 A JP1228376 A JP 1228376A JP S5296091 A JPS5296091 A JP S5296091A
Authority
JP
Japan
Prior art keywords
charged particles
type energy
electrostatic type
energy analyzer
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1228376A
Other languages
Japanese (ja)
Inventor
Katsuhisa Usami
Kiyoshi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1228376A priority Critical patent/JPS5296091A/en
Priority to US05/762,719 priority patent/US4126782A/en
Priority to GB3924/77A priority patent/GB1533526A/en
Priority to DE2705430A priority patent/DE2705430C3/en
Publication of JPS5296091A publication Critical patent/JPS5296091A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To simplify and reduce the size of an apparatus as a whole while making it possible to accomplish the analysis of a sample having a large area by bending the electrons from the sample so greatly by the use of the characteristics of a deflecting electrode and an analyzer of cylindrical mirror surface type that the electrons may intersect again on the center axis by the action of the deflecting electrode.
JP1228376A 1976-02-09 1976-02-09 Electrostatic type energy analyzer for charged particles Pending JPS5296091A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1228376A JPS5296091A (en) 1976-02-09 1976-02-09 Electrostatic type energy analyzer for charged particles
US05/762,719 US4126782A (en) 1976-02-09 1977-01-26 Electrostatic charged-particle analyzer
GB3924/77A GB1533526A (en) 1976-02-09 1977-01-31 Electro-static charged particle analyzers
DE2705430A DE2705430C3 (en) 1976-02-09 1977-02-09 Electrostatic analyzer for charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1228376A JPS5296091A (en) 1976-02-09 1976-02-09 Electrostatic type energy analyzer for charged particles

Publications (1)

Publication Number Publication Date
JPS5296091A true JPS5296091A (en) 1977-08-12

Family

ID=11801023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1228376A Pending JPS5296091A (en) 1976-02-09 1976-02-09 Electrostatic type energy analyzer for charged particles

Country Status (1)

Country Link
JP (1) JPS5296091A (en)

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