JPS5347263A - Scan-type electronic microscope and its similar device - Google Patents

Scan-type electronic microscope and its similar device

Info

Publication number
JPS5347263A
JPS5347263A JP12205376A JP12205376A JPS5347263A JP S5347263 A JPS5347263 A JP S5347263A JP 12205376 A JP12205376 A JP 12205376A JP 12205376 A JP12205376 A JP 12205376A JP S5347263 A JPS5347263 A JP S5347263A
Authority
JP
Japan
Prior art keywords
scan
similar device
type electronic
electronic microscope
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12205376A
Other languages
English (en)
Inventor
Shojiro Tagata
Hiroshi Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP12205376A priority Critical patent/JPS5347263A/ja
Publication of JPS5347263A publication Critical patent/JPS5347263A/ja
Pending legal-status Critical Current

Links

JP12205376A 1976-10-12 1976-10-12 Scan-type electronic microscope and its similar device Pending JPS5347263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12205376A JPS5347263A (en) 1976-10-12 1976-10-12 Scan-type electronic microscope and its similar device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12205376A JPS5347263A (en) 1976-10-12 1976-10-12 Scan-type electronic microscope and its similar device

Publications (1)

Publication Number Publication Date
JPS5347263A true JPS5347263A (en) 1978-04-27

Family

ID=14826438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12205376A Pending JPS5347263A (en) 1976-10-12 1976-10-12 Scan-type electronic microscope and its similar device

Country Status (1)

Country Link
JP (1) JPS5347263A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150256A (ja) * 1982-03-01 1983-09-06 Toshiba Corp ストロボ走査型電子顕微鏡装置
JPS60189148A (ja) * 1984-03-08 1985-09-26 Akashi Seisakusho Co Ltd 走査型電子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5181694A (ja) * 1975-01-16 1976-07-17 Hitachi Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5181694A (ja) * 1975-01-16 1976-07-17 Hitachi Ltd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150256A (ja) * 1982-03-01 1983-09-06 Toshiba Corp ストロボ走査型電子顕微鏡装置
JPS60189148A (ja) * 1984-03-08 1985-09-26 Akashi Seisakusho Co Ltd 走査型電子線装置

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