JPS5347784A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5347784A
JPS5347784A JP12264676A JP12264676A JPS5347784A JP S5347784 A JPS5347784 A JP S5347784A JP 12264676 A JP12264676 A JP 12264676A JP 12264676 A JP12264676 A JP 12264676A JP S5347784 A JPS5347784 A JP S5347784A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
active regions
thickness
thinning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12264676A
Other languages
Japanese (ja)
Inventor
Motoki Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12264676A priority Critical patent/JPS5347784A/en
Publication of JPS5347784A publication Critical patent/JPS5347784A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To reduce high frequency loss and increase oscillation efficiency and amplification gain by adjusting the non-active regions other than the electrodes of IMPATT diodes to a thickness of about 10μm, then forming an oxide film on their surface, and applying chemical etching and thinning the non-active regions to a desired thickness by repeating these.
COPYRIGHT: (C)1978,JPO&Japio
JP12264676A 1976-10-13 1976-10-13 Production of semiconductor device Pending JPS5347784A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12264676A JPS5347784A (en) 1976-10-13 1976-10-13 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12264676A JPS5347784A (en) 1976-10-13 1976-10-13 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5347784A true JPS5347784A (en) 1978-04-28

Family

ID=14841108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12264676A Pending JPS5347784A (en) 1976-10-13 1976-10-13 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5347784A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127801A (en) * 1984-11-22 1986-06-16 N D C Kk Production of acoustical material
JPH0758814B2 (en) * 1987-09-03 1995-06-21 パワー スペクトラ インコーポレイテッド Bulk avalanche semiconductor switch using electric field compression

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127801A (en) * 1984-11-22 1986-06-16 N D C Kk Production of acoustical material
JPH0758814B2 (en) * 1987-09-03 1995-06-21 パワー スペクトラ インコーポレイテッド Bulk avalanche semiconductor switch using electric field compression

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