JPS5349966A - Manufacture of semiconductor integrated circuit - Google Patents

Manufacture of semiconductor integrated circuit

Info

Publication number
JPS5349966A
JPS5349966A JP12380876A JP12380876A JPS5349966A JP S5349966 A JPS5349966 A JP S5349966A JP 12380876 A JP12380876 A JP 12380876A JP 12380876 A JP12380876 A JP 12380876A JP S5349966 A JPS5349966 A JP S5349966A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
semiconductor integrated
introduction
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12380876A
Other languages
Japanese (ja)
Inventor
Takahide Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12380876A priority Critical patent/JPS5349966A/en
Publication of JPS5349966A publication Critical patent/JPS5349966A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To ensure an introduction of a good-quality channel prevention Ptype impurity without increasing manufacture processes, by combining the anisotropic etching in which the etching velocity differs according to the phase direction and the introduction of P-type impurity by ion injection.
COPYRIGHT: (C)1978,JPO&Japio
JP12380876A 1976-10-18 1976-10-18 Manufacture of semiconductor integrated circuit Pending JPS5349966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12380876A JPS5349966A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12380876A JPS5349966A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5349966A true JPS5349966A (en) 1978-05-06

Family

ID=14869829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12380876A Pending JPS5349966A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5349966A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853843A (en) * 1981-09-25 1983-03-30 Toshiba Corp Manufacture of semiconductor device
US10407487B2 (en) 2007-03-06 2019-09-10 Amgen Inc. Variant activin receptor
US12383572B2 (en) 2013-02-01 2025-08-12 Amgen Inc. Administration of an anti-activin-a compound to a subject

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853843A (en) * 1981-09-25 1983-03-30 Toshiba Corp Manufacture of semiconductor device
US10407487B2 (en) 2007-03-06 2019-09-10 Amgen Inc. Variant activin receptor
US12383572B2 (en) 2013-02-01 2025-08-12 Amgen Inc. Administration of an anti-activin-a compound to a subject

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