JPS5352082A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS5352082A
JPS5352082A JP12687076A JP12687076A JPS5352082A JP S5352082 A JPS5352082 A JP S5352082A JP 12687076 A JP12687076 A JP 12687076A JP 12687076 A JP12687076 A JP 12687076A JP S5352082 A JPS5352082 A JP S5352082A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
occurring
damage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12687076A
Other languages
Japanese (ja)
Inventor
Toru Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12687076A priority Critical patent/JPS5352082A/en
Publication of JPS5352082A publication Critical patent/JPS5352082A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To prevent parasitic channels from occurring and obtain IC of a high reliability and a high integration degree by injecting impurity ions of a proper quantity - which cannot damage the characteristic of a semiconductor element to obtain a required threshold voltage.
COPYRIGHT: (C)1978,JPO&Japio
JP12687076A 1976-10-22 1976-10-22 Production of semiconductor integrated circuit Pending JPS5352082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12687076A JPS5352082A (en) 1976-10-22 1976-10-22 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12687076A JPS5352082A (en) 1976-10-22 1976-10-22 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5352082A true JPS5352082A (en) 1978-05-12

Family

ID=14945866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12687076A Pending JPS5352082A (en) 1976-10-22 1976-10-22 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5352082A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143855A (en) * 1981-02-27 1982-09-06 Nec Corp Semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143855A (en) * 1981-02-27 1982-09-06 Nec Corp Semiconductor integrated circuit device

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