JPS5352368A - Quartz tube for furnace - Google Patents
Quartz tube for furnaceInfo
- Publication number
- JPS5352368A JPS5352368A JP12723076A JP12723076A JPS5352368A JP S5352368 A JPS5352368 A JP S5352368A JP 12723076 A JP12723076 A JP 12723076A JP 12723076 A JP12723076 A JP 12723076A JP S5352368 A JPS5352368 A JP S5352368A
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- furnace
- entry
- preventing
- silicon nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000001627 detrimental effect Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Abstract
PURPOSE: A quartz tube for furnace capable of preventing the entry of detrimental impurities is obtained by using a silicon nitride film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12723076A JPS5352368A (en) | 1976-10-25 | 1976-10-25 | Quartz tube for furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12723076A JPS5352368A (en) | 1976-10-25 | 1976-10-25 | Quartz tube for furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5352368A true JPS5352368A (en) | 1978-05-12 |
Family
ID=14954939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12723076A Pending JPS5352368A (en) | 1976-10-25 | 1976-10-25 | Quartz tube for furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5352368A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54132164A (en) * | 1978-04-05 | 1979-10-13 | Toshiba Ceramics Co | Device for fabricating semiconductor |
| JPS57138142A (en) * | 1981-01-14 | 1982-08-26 | Northern Telecom Ltd | Method and device for coating semiconductor wafer |
-
1976
- 1976-10-25 JP JP12723076A patent/JPS5352368A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54132164A (en) * | 1978-04-05 | 1979-10-13 | Toshiba Ceramics Co | Device for fabricating semiconductor |
| JPS57138142A (en) * | 1981-01-14 | 1982-08-26 | Northern Telecom Ltd | Method and device for coating semiconductor wafer |
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