JPS5357781A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPS5357781A
JPS5357781A JP13237176A JP13237176A JPS5357781A JP S5357781 A JPS5357781 A JP S5357781A JP 13237176 A JP13237176 A JP 13237176A JP 13237176 A JP13237176 A JP 13237176A JP S5357781 A JPS5357781 A JP S5357781A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
denser
contact holes
inside angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13237176A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ogita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13237176A priority Critical patent/JPS5357781A/en
Publication of JPS5357781A publication Critical patent/JPS5357781A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain an LSI mask denser than before by using polygonal contact holes other than 90° of inside angle.
COPYRIGHT: (C)1978,JPO&Japio
JP13237176A 1976-11-05 1976-11-05 Semiconductor integrated circuit Pending JPS5357781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13237176A JPS5357781A (en) 1976-11-05 1976-11-05 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13237176A JPS5357781A (en) 1976-11-05 1976-11-05 Semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5357781A true JPS5357781A (en) 1978-05-25

Family

ID=15079797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13237176A Pending JPS5357781A (en) 1976-11-05 1976-11-05 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5357781A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194542A (en) * 1984-03-16 1985-10-03 Rohm Co Ltd Forming method of pattern for inter-layer insulating film
JPS63318141A (en) * 1987-06-19 1988-12-27 Mitsubishi Electric Corp Semiconductor device
JPH01117045A (en) * 1987-10-29 1989-05-09 Seiko Epson Corp Semiconductor integrated circuit device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194542A (en) * 1984-03-16 1985-10-03 Rohm Co Ltd Forming method of pattern for inter-layer insulating film
JPS63318141A (en) * 1987-06-19 1988-12-27 Mitsubishi Electric Corp Semiconductor device
JPH01117045A (en) * 1987-10-29 1989-05-09 Seiko Epson Corp Semiconductor integrated circuit device

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