JPS5362990A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5362990A JPS5362990A JP13895276A JP13895276A JPS5362990A JP S5362990 A JPS5362990 A JP S5362990A JP 13895276 A JP13895276 A JP 13895276A JP 13895276 A JP13895276 A JP 13895276A JP S5362990 A JPS5362990 A JP S5362990A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- films
- wiring electrode
- forming region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain Al films having fine patterns which are isolated between two regions by forming raised form protecting film at the boundary between the wiring electrode forming region and non-wiring electrode forming region on a semiconductor substrate and evaporating an Al film over the entire surface thereafter removing the protecting films.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13895276A JPS5362990A (en) | 1976-11-17 | 1976-11-17 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13895276A JPS5362990A (en) | 1976-11-17 | 1976-11-17 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362990A true JPS5362990A (en) | 1978-06-05 |
| JPS5742219B2 JPS5742219B2 (en) | 1982-09-07 |
Family
ID=15233984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13895276A Granted JPS5362990A (en) | 1976-11-17 | 1976-11-17 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5362990A (en) |
-
1976
- 1976-11-17 JP JP13895276A patent/JPS5362990A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5742219B2 (en) | 1982-09-07 |
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