JPS5366174A - Finding method for defective part of semiconductor unit - Google Patents

Finding method for defective part of semiconductor unit

Info

Publication number
JPS5366174A
JPS5366174A JP14113976A JP14113976A JPS5366174A JP S5366174 A JPS5366174 A JP S5366174A JP 14113976 A JP14113976 A JP 14113976A JP 14113976 A JP14113976 A JP 14113976A JP S5366174 A JPS5366174 A JP S5366174A
Authority
JP
Japan
Prior art keywords
semiconductor unit
defective part
finding method
defective parts
exposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14113976A
Other languages
Japanese (ja)
Inventor
Kazutoyo Narita
Tadashi Sakagami
Noboru Kawasaki
Motoji Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Minebea Power Semiconductor Device Inc
Original Assignee
Hitachi Ltd
Hitachi Haramachi Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Haramachi Electronics Ltd filed Critical Hitachi Ltd
Priority to JP14113976A priority Critical patent/JPS5366174A/en
Publication of JPS5366174A publication Critical patent/JPS5366174A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To detect defective parts by exposing the Si part of a semiconductor unit and applying the reverse voltage gradually in a dark room to made the defective parts luminous.
COPYRIGHT: (C)1978,JPO&Japio
JP14113976A 1976-11-26 1976-11-26 Finding method for defective part of semiconductor unit Pending JPS5366174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14113976A JPS5366174A (en) 1976-11-26 1976-11-26 Finding method for defective part of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14113976A JPS5366174A (en) 1976-11-26 1976-11-26 Finding method for defective part of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5366174A true JPS5366174A (en) 1978-06-13

Family

ID=15285067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14113976A Pending JPS5366174A (en) 1976-11-26 1976-11-26 Finding method for defective part of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5366174A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120031A (en) * 1987-11-02 1989-05-12 Shin Etsu Handotai Co Ltd Detection of abnormal layer of epitaxial wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120031A (en) * 1987-11-02 1989-05-12 Shin Etsu Handotai Co Ltd Detection of abnormal layer of epitaxial wafer

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