JPS5367454A - Integrated light circuit and its production - Google Patents

Integrated light circuit and its production

Info

Publication number
JPS5367454A
JPS5367454A JP14362676A JP14362676A JPS5367454A JP S5367454 A JPS5367454 A JP S5367454A JP 14362676 A JP14362676 A JP 14362676A JP 14362676 A JP14362676 A JP 14362676A JP S5367454 A JPS5367454 A JP S5367454A
Authority
JP
Japan
Prior art keywords
production
integrated light
light circuit
make
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14362676A
Other languages
Japanese (ja)
Other versions
JPS6015041B2 (en
Inventor
Kiyoshi Asakawa
Hidekazu Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14362676A priority Critical patent/JPS6015041B2/en
Publication of JPS5367454A publication Critical patent/JPS5367454A/en
Publication of JPS6015041B2 publication Critical patent/JPS6015041B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/281—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To make the circuit different from before and make its functions superior by providing an oxy silicon nitride thin-film optical guide whose composition or thickness changes in a plane or thickness direction on an optical substrate.
JP14362676A 1976-11-29 1976-11-29 Method of manufacturing integrated optical circuits Expired JPS6015041B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14362676A JPS6015041B2 (en) 1976-11-29 1976-11-29 Method of manufacturing integrated optical circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14362676A JPS6015041B2 (en) 1976-11-29 1976-11-29 Method of manufacturing integrated optical circuits

Publications (2)

Publication Number Publication Date
JPS5367454A true JPS5367454A (en) 1978-06-15
JPS6015041B2 JPS6015041B2 (en) 1985-04-17

Family

ID=15343117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14362676A Expired JPS6015041B2 (en) 1976-11-29 1976-11-29 Method of manufacturing integrated optical circuits

Country Status (1)

Country Link
JP (1) JPS6015041B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042514A1 (en) * 1980-06-20 1981-12-30 Siemens Aktiengesellschaft Planar wave guide lens, its application and manufacture
JPS607404A (en) * 1983-06-28 1985-01-16 Nec Corp Manufacture of convergent type glass waveguide
JPS60114811A (en) * 1983-11-28 1985-06-21 Hitachi Ltd Optical waveguide and its production
JPS60162207A (en) * 1984-02-01 1985-08-24 Hitachi Ltd Optical waveguide and its manufacturing method
EP1503229A1 (en) * 2003-08-01 2005-02-02 BAE SYSTEMS Information and Electronic Systems Integration, Inc. Method of forming interlayer connections in integrated optical circuits, and devices formed using same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0042514A1 (en) * 1980-06-20 1981-12-30 Siemens Aktiengesellschaft Planar wave guide lens, its application and manufacture
JPS607404A (en) * 1983-06-28 1985-01-16 Nec Corp Manufacture of convergent type glass waveguide
JPS60114811A (en) * 1983-11-28 1985-06-21 Hitachi Ltd Optical waveguide and its production
JPS60162207A (en) * 1984-02-01 1985-08-24 Hitachi Ltd Optical waveguide and its manufacturing method
EP1503229A1 (en) * 2003-08-01 2005-02-02 BAE SYSTEMS Information and Electronic Systems Integration, Inc. Method of forming interlayer connections in integrated optical circuits, and devices formed using same

Also Published As

Publication number Publication date
JPS6015041B2 (en) 1985-04-17

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