JPS5367478A - Pressure detector - Google Patents

Pressure detector

Info

Publication number
JPS5367478A
JPS5367478A JP14222176A JP14222176A JPS5367478A JP S5367478 A JPS5367478 A JP S5367478A JP 14222176 A JP14222176 A JP 14222176A JP 14222176 A JP14222176 A JP 14222176A JP S5367478 A JPS5367478 A JP S5367478A
Authority
JP
Japan
Prior art keywords
pressure detector
detector
pressure
inducing
stationalry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14222176A
Other languages
Japanese (ja)
Other versions
JPS5634109B2 (en
Inventor
Yoshitaka Matsuoka
Yukio Takahashi
Satoshi Shimada
Katsuya Katogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14222176A priority Critical patent/JPS5367478A/en
Publication of JPS5367478A publication Critical patent/JPS5367478A/en
Publication of JPS5634109B2 publication Critical patent/JPS5634109B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To enable the detector to be used for a long time at stable accuracy by forming a semiconductor single crystal with a starin inducing part which induces strain according to pressure and a stationalry part and diffusing a diffused region across the strain inducing part and stationary part.
COPYRIGHT: (C)1978,JPO&Japio
JP14222176A 1976-11-29 1976-11-29 Pressure detector Granted JPS5367478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14222176A JPS5367478A (en) 1976-11-29 1976-11-29 Pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14222176A JPS5367478A (en) 1976-11-29 1976-11-29 Pressure detector

Publications (2)

Publication Number Publication Date
JPS5367478A true JPS5367478A (en) 1978-06-15
JPS5634109B2 JPS5634109B2 (en) 1981-08-07

Family

ID=15310221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14222176A Granted JPS5367478A (en) 1976-11-29 1976-11-29 Pressure detector

Country Status (1)

Country Link
JP (1) JPS5367478A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57125827A (en) * 1981-01-29 1982-08-05 Mitsubishi Electric Corp Semiconductor pressure sensor for car
JPS57197873A (en) * 1981-05-29 1982-12-04 Hitachi Ltd Semiconductor pressure detector
JPS61140934U (en) * 1985-02-22 1986-09-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57125827A (en) * 1981-01-29 1982-08-05 Mitsubishi Electric Corp Semiconductor pressure sensor for car
JPS57197873A (en) * 1981-05-29 1982-12-04 Hitachi Ltd Semiconductor pressure detector
JPS61140934U (en) * 1985-02-22 1986-09-01

Also Published As

Publication number Publication date
JPS5634109B2 (en) 1981-08-07

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