JPS5367498A - Gas detector - Google Patents
Gas detectorInfo
- Publication number
- JPS5367498A JPS5367498A JP14222276A JP14222276A JPS5367498A JP S5367498 A JPS5367498 A JP S5367498A JP 14222276 A JP14222276 A JP 14222276A JP 14222276 A JP14222276 A JP 14222276A JP S5367498 A JPS5367498 A JP S5367498A
- Authority
- JP
- Japan
- Prior art keywords
- gas detector
- forming
- film
- respose
- ability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14222276A JPS5367498A (en) | 1976-11-29 | 1976-11-29 | Gas detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14222276A JPS5367498A (en) | 1976-11-29 | 1976-11-29 | Gas detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5367498A true JPS5367498A (en) | 1978-06-15 |
Family
ID=15310244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14222276A Pending JPS5367498A (en) | 1976-11-29 | 1976-11-29 | Gas detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5367498A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104357U (ja) * | 1980-12-18 | 1982-06-26 |
-
1976
- 1976-11-29 JP JP14222276A patent/JPS5367498A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57104357U (ja) * | 1980-12-18 | 1982-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS51144183A (en) | Semiconductor element containing surface protection film | |
| JPS5354971A (en) | Semiconductor device | |
| JPS5258579A (en) | Temperature detector | |
| JPS52106787A (en) | Gas and humidity detection element | |
| JPS51132879A (en) | Composite detector | |
| JPS5253670A (en) | Semiconductor device | |
| JPS5267838A (en) | High frequency heater | |
| JPS5375770A (en) | X-ray copying mask | |
| JPS52155396A (en) | Organic semiconductor heat sensitive material | |
| JPS51145267A (en) | Manufacture of semiconductor device | |
| JPS5326681A (en) | Manufact ure of semiconductor device | |
| JPS5330274A (en) | Semiconductor device | |
| JPS51151094A (en) | Light conductive element and its manufacturing method | |
| JPS51115766A (en) | Non-varorized getter material | |
| JPS52153498A (en) | Gas sensitive element | |
| JPS5268371A (en) | Semiconductor device | |
| JPS51135538A (en) | Sensitive composition for electronic photography | |
| JPS5351965A (en) | Semiconductor unit | |
| JPS5335375A (en) | Heating method | |
| JPS5258945A (en) | Displacement detector | |
| JPS52152252A (en) | Heat meterial detector | |
| JPS5314350A (en) | Current detector | |
| JPS5220007A (en) | Locating method | |
| JPS5210800A (en) | Use of semi-conductor gas detector element | |
| JPS54871A (en) | Manufacture of semiconductor device |