JPS5368172A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5368172A
JPS5368172A JP14411176A JP14411176A JPS5368172A JP S5368172 A JPS5368172 A JP S5368172A JP 14411176 A JP14411176 A JP 14411176A JP 14411176 A JP14411176 A JP 14411176A JP S5368172 A JPS5368172 A JP S5368172A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
photoresist film
film
react
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14411176A
Other languages
Japanese (ja)
Inventor
Chuichi Takada
Ryoji Abe
Yorihiro Uchiyama
Kuniaki Makabe
Makoto Serigano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14411176A priority Critical patent/JPS5368172A/en
Publication of JPS5368172A publication Critical patent/JPS5368172A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To form fine patterns by providing a resin thin-film which does not react with the photoresist film of a required thickness and transmits ultraviolet rays on said photoresist film.
COPYRIGHT: (C)1978,JPO&Japio
JP14411176A 1976-11-30 1976-11-30 Production of semiconductor device Pending JPS5368172A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14411176A JPS5368172A (en) 1976-11-30 1976-11-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14411176A JPS5368172A (en) 1976-11-30 1976-11-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5368172A true JPS5368172A (en) 1978-06-17

Family

ID=15354430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14411176A Pending JPS5368172A (en) 1976-11-30 1976-11-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5368172A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749980A (en) * 1980-07-14 1982-03-24 Hughes Aircraft Co Holographic exposure device and method of producing same
JPH03222409A (en) * 1990-01-29 1991-10-01 Nec Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749980A (en) * 1980-07-14 1982-03-24 Hughes Aircraft Co Holographic exposure device and method of producing same
JPH03222409A (en) * 1990-01-29 1991-10-01 Nec Corp Manufacture of semiconductor device

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