JPS5368190A - Production of elastic surface wave resonator - Google Patents

Production of elastic surface wave resonator

Info

Publication number
JPS5368190A
JPS5368190A JP14425576A JP14425576A JPS5368190A JP S5368190 A JPS5368190 A JP S5368190A JP 14425576 A JP14425576 A JP 14425576A JP 14425576 A JP14425576 A JP 14425576A JP S5368190 A JPS5368190 A JP S5368190A
Authority
JP
Japan
Prior art keywords
surface wave
wave resonator
elastic surface
production
damaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14425576A
Other languages
Japanese (ja)
Other versions
JPS5911287B2 (en
Inventor
Kiyoshi Asakawa
Katsuhiko Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14425576A priority Critical patent/JPS5911287B2/en
Publication of JPS5368190A publication Critical patent/JPS5368190A/en
Publication of JPS5911287B2 publication Critical patent/JPS5911287B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To obtain a production process for an elastic surface wave resonator capable of readily performing anodization treatment of distribution type reflectors without damaging parallel stripe form electrodes.
JP14425576A 1976-11-30 1976-11-30 Manufacturing method of surface acoustic wave resonator Expired JPS5911287B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14425576A JPS5911287B2 (en) 1976-11-30 1976-11-30 Manufacturing method of surface acoustic wave resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14425576A JPS5911287B2 (en) 1976-11-30 1976-11-30 Manufacturing method of surface acoustic wave resonator

Publications (2)

Publication Number Publication Date
JPS5368190A true JPS5368190A (en) 1978-06-17
JPS5911287B2 JPS5911287B2 (en) 1984-03-14

Family

ID=15357836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14425576A Expired JPS5911287B2 (en) 1976-11-30 1976-11-30 Manufacturing method of surface acoustic wave resonator

Country Status (1)

Country Link
JP (1) JPS5911287B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8201311B1 (en) * 2005-05-25 2012-06-19 Triquint Semiconductor, Inc. Process of making a BAW resonator bi-layer top electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8201311B1 (en) * 2005-05-25 2012-06-19 Triquint Semiconductor, Inc. Process of making a BAW resonator bi-layer top electrode

Also Published As

Publication number Publication date
JPS5911287B2 (en) 1984-03-14

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