JPS5372574A - Patterning method for resist - Google Patents

Patterning method for resist

Info

Publication number
JPS5372574A
JPS5372574A JP14856276A JP14856276A JPS5372574A JP S5372574 A JPS5372574 A JP S5372574A JP 14856276 A JP14856276 A JP 14856276A JP 14856276 A JP14856276 A JP 14856276A JP S5372574 A JPS5372574 A JP S5372574A
Authority
JP
Japan
Prior art keywords
resist
patterning method
resist film
sensitive
drag
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14856276A
Other languages
Japanese (ja)
Inventor
Masao Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14856276A priority Critical patent/JPS5372574A/en
Publication of JPS5372574A publication Critical patent/JPS5372574A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To avoid the drag or mixture of the double-layer resist film of the sensitive and non-sensitive materials by giving an incineration process after exposure and development to the resist film, thus forming a pattern in a desired shape.
COPYRIGHT: (C)1978,JPO&Japio
JP14856276A 1976-12-10 1976-12-10 Patterning method for resist Pending JPS5372574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14856276A JPS5372574A (en) 1976-12-10 1976-12-10 Patterning method for resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14856276A JPS5372574A (en) 1976-12-10 1976-12-10 Patterning method for resist

Publications (1)

Publication Number Publication Date
JPS5372574A true JPS5372574A (en) 1978-06-28

Family

ID=15455518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14856276A Pending JPS5372574A (en) 1976-12-10 1976-12-10 Patterning method for resist

Country Status (1)

Country Link
JP (1) JPS5372574A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045571A (en) * 1973-08-25 1975-04-23
JPS5144065A (en) * 1974-10-10 1976-04-15 Kazuji Kumagai RENZAIYOHABURATSUSHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045571A (en) * 1973-08-25 1975-04-23
JPS5144065A (en) * 1974-10-10 1976-04-15 Kazuji Kumagai RENZAIYOHABURATSUSHI

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