JPS5372679A - Surface defect detection of test piece - Google Patents

Surface defect detection of test piece

Info

Publication number
JPS5372679A
JPS5372679A JP14776476A JP14776476A JPS5372679A JP S5372679 A JPS5372679 A JP S5372679A JP 14776476 A JP14776476 A JP 14776476A JP 14776476 A JP14776476 A JP 14776476A JP S5372679 A JPS5372679 A JP S5372679A
Authority
JP
Japan
Prior art keywords
test piece
defect detection
surface defect
lights
scattered lights
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14776476A
Other languages
English (en)
Inventor
Yasuo Nakagawa
Toshimitsu Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to IS2359A priority Critical patent/IS1093B6/is
Priority to IS2359D priority patent/IS1094B6/is
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14776476A priority patent/JPS5372679A/ja
Priority to US05/859,206 priority patent/US4162126A/en
Publication of JPS5372679A publication Critical patent/JPS5372679A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP14776476A 1976-12-10 1976-12-10 Surface defect detection of test piece Pending JPS5372679A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IS2359A IS1093B6 (is) 1976-12-10 1976-12-06 Ný gerð af korklínu og aðferð til að búa hana til
IS2359D IS1094B6 (is) 1976-12-10 1976-12-06 Tæki til að búa til nýja gerð af korklínu
JP14776476A JPS5372679A (en) 1976-12-10 1976-12-10 Surface defect detection of test piece
US05/859,206 US4162126A (en) 1976-12-10 1977-12-09 Surface detect test apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14776476A JPS5372679A (en) 1976-12-10 1976-12-10 Surface defect detection of test piece

Publications (1)

Publication Number Publication Date
JPS5372679A true JPS5372679A (en) 1978-06-28

Family

ID=15437633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14776476A Pending JPS5372679A (en) 1976-12-10 1976-12-10 Surface defect detection of test piece

Country Status (2)

Country Link
JP (1) JPS5372679A (ja)
IS (2) IS1094B6 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868630A (ja) * 1981-10-20 1983-04-23 Toppan Printing Co Ltd 多色パタ−ンの欠陥検査方法
JPS58211636A (ja) * 1982-06-03 1983-12-09 Eisai Co Ltd 検査装置における判定方法およびその装置
JPH02100393A (ja) * 1988-10-07 1990-04-12 Hitachi Ltd スルーホール充填状態検査方法およびその装置
JPH05232044A (ja) * 1991-11-22 1993-09-07 Elkem Technol As 連続鋳造金属ビレットのピンホールを検出する方法
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method
US5493123A (en) * 1994-04-28 1996-02-20 Particle Measuring Systems, Inc. Surface defect inspection system and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868630A (ja) * 1981-10-20 1983-04-23 Toppan Printing Co Ltd 多色パタ−ンの欠陥検査方法
JPS58211636A (ja) * 1982-06-03 1983-12-09 Eisai Co Ltd 検査装置における判定方法およびその装置
JPH02100393A (ja) * 1988-10-07 1990-04-12 Hitachi Ltd スルーホール充填状態検査方法およびその装置
JPH05232044A (ja) * 1991-11-22 1993-09-07 Elkem Technol As 連続鋳造金属ビレットのピンホールを検出する方法
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method
US5493123A (en) * 1994-04-28 1996-02-20 Particle Measuring Systems, Inc. Surface defect inspection system and method

Also Published As

Publication number Publication date
IS2359A7 (is) 1977-10-28
IS1094B6 (is) 1982-09-24
IS1093B6 (is) 1982-09-24

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