JPS5377848A - Etching method that prevent side etch - Google Patents

Etching method that prevent side etch

Info

Publication number
JPS5377848A
JPS5377848A JP15394576A JP15394576A JPS5377848A JP S5377848 A JPS5377848 A JP S5377848A JP 15394576 A JP15394576 A JP 15394576A JP 15394576 A JP15394576 A JP 15394576A JP S5377848 A JPS5377848 A JP S5377848A
Authority
JP
Japan
Prior art keywords
etching method
prevent side
side etch
etch
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15394576A
Other languages
Japanese (ja)
Inventor
Takao Murakawa
Shigeki Yamasato
Hiroshi Tanabe
Shinichi Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP15394576A priority Critical patent/JPS5377848A/en
Publication of JPS5377848A publication Critical patent/JPS5377848A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP15394576A 1976-12-21 1976-12-21 Etching method that prevent side etch Pending JPS5377848A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15394576A JPS5377848A (en) 1976-12-21 1976-12-21 Etching method that prevent side etch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15394576A JPS5377848A (en) 1976-12-21 1976-12-21 Etching method that prevent side etch

Publications (1)

Publication Number Publication Date
JPS5377848A true JPS5377848A (en) 1978-07-10

Family

ID=15573501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15394576A Pending JPS5377848A (en) 1976-12-21 1976-12-21 Etching method that prevent side etch

Country Status (1)

Country Link
JP (1) JPS5377848A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716169A (en) * 1980-07-02 1982-01-27 Kangiyou Denki Kiki Kk Chemical etching process
JPS5792177A (en) * 1980-12-01 1982-06-08 Mitsubishi Heavy Ind Ltd Etching method
US4470872A (en) * 1982-05-24 1984-09-11 Kangyo Denkikiki Kabushiki Kaisha Preventing side-etching by adhering an overhang mask to the sidewall with adhesive
WO2004065660A1 (en) * 2003-01-17 2004-08-05 Toppan Printing Co., Ltd. Metal photo-etching product and production method therefor
TWI673121B (en) * 2018-12-03 2019-10-01 旭暉應用材料股份有限公司 Ring metal sheet manufacturing

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716169A (en) * 1980-07-02 1982-01-27 Kangiyou Denki Kiki Kk Chemical etching process
JPS5792177A (en) * 1980-12-01 1982-06-08 Mitsubishi Heavy Ind Ltd Etching method
US4470872A (en) * 1982-05-24 1984-09-11 Kangyo Denkikiki Kabushiki Kaisha Preventing side-etching by adhering an overhang mask to the sidewall with adhesive
EP0095172A3 (en) * 1982-05-24 1985-06-19 Kangyo Denkikiki Kabushiki Kaisha Chemical etching method
WO2004065660A1 (en) * 2003-01-17 2004-08-05 Toppan Printing Co., Ltd. Metal photo-etching product and production method therefor
JPWO2004065660A1 (en) * 2003-01-17 2006-05-18 凸版印刷株式会社 Metal photoetching product and method of manufacturing the same
US7498074B2 (en) 2003-01-17 2009-03-03 Toppan Printing Co., Ltd. Metal photoetching product and production method thereof
JP4534984B2 (en) * 2003-01-17 2010-09-01 凸版印刷株式会社 Method for producing metal photoetched product
KR101094798B1 (en) 2003-01-17 2011-12-16 도판 인사츠 가부시키가이샤 Metal Photo Etching Products and Manufacturing Method Thereof
US8110344B2 (en) 2003-01-17 2012-02-07 Toppan Printing Co., Ltd. Metal photoetching product and production method thereof
TWI673121B (en) * 2018-12-03 2019-10-01 旭暉應用材料股份有限公司 Ring metal sheet manufacturing

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