JPS5379737A - Chemical dry etching method - Google Patents

Chemical dry etching method

Info

Publication number
JPS5379737A
JPS5379737A JP15578276A JP15578276A JPS5379737A JP S5379737 A JPS5379737 A JP S5379737A JP 15578276 A JP15578276 A JP 15578276A JP 15578276 A JP15578276 A JP 15578276A JP S5379737 A JPS5379737 A JP S5379737A
Authority
JP
Japan
Prior art keywords
dry etching
etching method
chemical dry
chemical
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15578276A
Other languages
English (en)
Other versions
JPS5913591B2 (ja
Inventor
Toshiaki Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15578276A priority Critical patent/JPS5913591B2/ja
Publication of JPS5379737A publication Critical patent/JPS5379737A/ja
Publication of JPS5913591B2 publication Critical patent/JPS5913591B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP15578276A 1976-12-24 1976-12-24 ドライエッチング方法 Expired JPS5913591B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15578276A JPS5913591B2 (ja) 1976-12-24 1976-12-24 ドライエッチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15578276A JPS5913591B2 (ja) 1976-12-24 1976-12-24 ドライエッチング方法

Publications (2)

Publication Number Publication Date
JPS5379737A true JPS5379737A (en) 1978-07-14
JPS5913591B2 JPS5913591B2 (ja) 1984-03-30

Family

ID=15613283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15578276A Expired JPS5913591B2 (ja) 1976-12-24 1976-12-24 ドライエッチング方法

Country Status (1)

Country Link
JP (1) JPS5913591B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1998373A3 (en) 2005-09-29 2012-10-31 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device having oxide semiconductor layer and manufacturing method thereof

Also Published As

Publication number Publication date
JPS5913591B2 (ja) 1984-03-30

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