JPS5380166A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5380166A JPS5380166A JP15677076A JP15677076A JPS5380166A JP S5380166 A JPS5380166 A JP S5380166A JP 15677076 A JP15677076 A JP 15677076A JP 15677076 A JP15677076 A JP 15677076A JP S5380166 A JPS5380166 A JP S5380166A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- irradiated
- integration
- reliability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: The substance causing polymerization by being irradiated by infrared rays is used as a mask film for reducing the frequency of using a photo mask and the source, gate and drain regions are obtained easily by a self-alignment method, thereby improving the integration and reliability.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677076A JPS5380166A (en) | 1976-12-25 | 1976-12-25 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677076A JPS5380166A (en) | 1976-12-25 | 1976-12-25 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5380166A true JPS5380166A (en) | 1978-07-15 |
Family
ID=15634925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15677076A Pending JPS5380166A (en) | 1976-12-25 | 1976-12-25 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5380166A (en) |
-
1976
- 1976-12-25 JP JP15677076A patent/JPS5380166A/en active Pending
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