JPS538048A - Electron lens - Google Patents

Electron lens

Info

Publication number
JPS538048A
JPS538048A JP8198476A JP8198476A JPS538048A JP S538048 A JPS538048 A JP S538048A JP 8198476 A JP8198476 A JP 8198476A JP 8198476 A JP8198476 A JP 8198476A JP S538048 A JPS538048 A JP S538048A
Authority
JP
Japan
Prior art keywords
electron lens
coil
utilizing
heat produced
effectively eliminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8198476A
Other languages
Japanese (ja)
Inventor
Michio Yanatori
Yasunari Kashiwara
Teiji Katsuta
Shinjiro Katagiri
Tsutomu Komoda
Susumu Ozasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8198476A priority Critical patent/JPS538048A/en
Publication of JPS538048A publication Critical patent/JPS538048A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To effectively eliminate the heat produced in the coil and to make higher the coil current rating, by utilizing the boiling phenomenon of evaporating liquid to the coil cooling used for electron lens.
COPYRIGHT: (C)1978,JPO&Japio
JP8198476A 1976-07-12 1976-07-12 Electron lens Pending JPS538048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8198476A JPS538048A (en) 1976-07-12 1976-07-12 Electron lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8198476A JPS538048A (en) 1976-07-12 1976-07-12 Electron lens

Publications (1)

Publication Number Publication Date
JPS538048A true JPS538048A (en) 1978-01-25

Family

ID=13761733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8198476A Pending JPS538048A (en) 1976-07-12 1976-07-12 Electron lens

Country Status (1)

Country Link
JP (1) JPS538048A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61269839A (en) * 1985-03-25 1986-11-29 スムスコエ　プロイズボドストベンノエ　オビエデイネニエ　“エレクトロン” Electromagnetic lens and electronic microscope using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61269839A (en) * 1985-03-25 1986-11-29 スムスコエ　プロイズボドストベンノエ　オビエデイネニエ　“エレクトロン” Electromagnetic lens and electronic microscope using the same

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