JPS538376A - Preparation of magnetic recording material by evaporation process with oblique incidence - Google Patents

Preparation of magnetic recording material by evaporation process with oblique incidence

Info

Publication number
JPS538376A
JPS538376A JP8192876A JP8192876A JPS538376A JP S538376 A JPS538376 A JP S538376A JP 8192876 A JP8192876 A JP 8192876A JP 8192876 A JP8192876 A JP 8192876A JP S538376 A JPS538376 A JP S538376A
Authority
JP
Japan
Prior art keywords
evaporation process
oblique incidence
preparation
magnetic recording
recording material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8192876A
Other languages
English (en)
Inventor
Hirobumi Oota
Kyuzo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP8192876A priority Critical patent/JPS538376A/ja
Publication of JPS538376A publication Critical patent/JPS538376A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP8192876A 1976-07-12 1976-07-12 Preparation of magnetic recording material by evaporation process with oblique incidence Pending JPS538376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8192876A JPS538376A (en) 1976-07-12 1976-07-12 Preparation of magnetic recording material by evaporation process with oblique incidence

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8192876A JPS538376A (en) 1976-07-12 1976-07-12 Preparation of magnetic recording material by evaporation process with oblique incidence

Publications (1)

Publication Number Publication Date
JPS538376A true JPS538376A (en) 1978-01-25

Family

ID=13760114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8192876A Pending JPS538376A (en) 1976-07-12 1976-07-12 Preparation of magnetic recording material by evaporation process with oblique incidence

Country Status (1)

Country Link
JP (1) JPS538376A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164295A (ja) * 1985-01-11 1986-07-24 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 有機基板への金属付着方法
JPH0397851A (ja) * 1989-09-11 1991-04-23 Shin Meiwa Ind Co Ltd 真空蒸着設備における蒸発源出入装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164295A (ja) * 1985-01-11 1986-07-24 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 有機基板への金属付着方法
JPH0397851A (ja) * 1989-09-11 1991-04-23 Shin Meiwa Ind Co Ltd 真空蒸着設備における蒸発源出入装置

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