JPS5384573A - Manufacture for mis type semiconductor device - Google Patents

Manufacture for mis type semiconductor device

Info

Publication number
JPS5384573A
JPS5384573A JP16029976A JP16029976A JPS5384573A JP S5384573 A JPS5384573 A JP S5384573A JP 16029976 A JP16029976 A JP 16029976A JP 16029976 A JP16029976 A JP 16029976A JP S5384573 A JPS5384573 A JP S5384573A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
type semiconductor
mis type
shallow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16029976A
Other languages
Japanese (ja)
Inventor
Shinpei Tanaka
Kazunari Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16029976A priority Critical patent/JPS5384573A/en
Publication of JPS5384573A publication Critical patent/JPS5384573A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To manufacture FET of high performance, by producing the source and the drain with the impurity domain having shallow and deep parts through ion injection once and by reducing the parasitic capacitance between the electrodes.
COPYRIGHT: (C)1978,JPO&Japio
JP16029976A 1976-12-29 1976-12-29 Manufacture for mis type semiconductor device Pending JPS5384573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16029976A JPS5384573A (en) 1976-12-29 1976-12-29 Manufacture for mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16029976A JPS5384573A (en) 1976-12-29 1976-12-29 Manufacture for mis type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5384573A true JPS5384573A (en) 1978-07-26

Family

ID=15711953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16029976A Pending JPS5384573A (en) 1976-12-29 1976-12-29 Manufacture for mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5384573A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742168A (en) * 1980-08-28 1982-03-09 Fujitsu Ltd Production of semiconducdor device
JPS5743467A (en) * 1980-08-29 1982-03-11 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742168A (en) * 1980-08-28 1982-03-09 Fujitsu Ltd Production of semiconducdor device
JPS5743467A (en) * 1980-08-29 1982-03-11 Fujitsu Ltd Manufacture of semiconductor device

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