JPS5385149A - Ion source - Google Patents

Ion source

Info

Publication number
JPS5385149A
JPS5385149A JP3877A JP3877A JPS5385149A JP S5385149 A JPS5385149 A JP S5385149A JP 3877 A JP3877 A JP 3877A JP 3877 A JP3877 A JP 3877A JP S5385149 A JPS5385149 A JP S5385149A
Authority
JP
Japan
Prior art keywords
ion source
ion beam
discharge room
increment
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3877A
Other languages
Japanese (ja)
Inventor
Sumio Hosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3877A priority Critical patent/JPS5385149A/en
Publication of JPS5385149A publication Critical patent/JPS5385149A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To obtain more uniform ion beam by providing a sub-discharge room in the discharge room of the ion source and preventing the increment of power consumption of filament in order to lead out ion beam of a large diameter.
COPYRIGHT: (C)1978,JPO&Japio
JP3877A 1977-01-05 1977-01-05 Ion source Pending JPS5385149A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3877A JPS5385149A (en) 1977-01-05 1977-01-05 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3877A JPS5385149A (en) 1977-01-05 1977-01-05 Ion source

Publications (1)

Publication Number Publication Date
JPS5385149A true JPS5385149A (en) 1978-07-27

Family

ID=11463144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3877A Pending JPS5385149A (en) 1977-01-05 1977-01-05 Ion source

Country Status (1)

Country Link
JP (1) JPS5385149A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002140997A (en) * 2000-11-02 2002-05-17 Nissin Electric Co Ltd Ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002140997A (en) * 2000-11-02 2002-05-17 Nissin Electric Co Ltd Ion source

Similar Documents

Publication Publication Date Title
JPS52110563A (en) Hexagonal boride cathode
JPS51118395A (en) Semiconductor emitting unit and manufacturing process
JPS5434541A (en) Humidifier for air-conditioning
JPS5244155A (en) Microwave ion source for paper-strip type beam
JPS534382A (en) High frequency illuminator
JPS53132983A (en) X-ray tube cathode and its production method
JPS5292473A (en) Main lens electric field forming method of inline type 3 beam electron gun
JPS53138284A (en) Manufacture for semiconductor part
JPS52142880A (en) Fluorescent lamp
JPS51122373A (en) Electric microscope
JPS52115161A (en) Electron gun for electron beam exposing device
JPS51151062A (en) Electron tube
JPS5390858A (en) Magnetron
JPS523490A (en) Monitor of radiation energy
JPS524030A (en) Electric power supplying apparatus
JPS51115787A (en) Electric field emission plate
JPS51128836A (en) An aeration device
JPS5434761A (en) Lead frame and its manufacture
JPS51141998A (en) Multiple coaxial micro wave ion source
JPS5233349A (en) Humidifier
JPS51135193A (en) Lighting equipment
JPS52131287A (en) Cutting method of filament
JPS5434172A (en) Electromagnetic-shielding dust-proof constant-temperature chamber
JPS52153612A (en) Booster
JPS5217609A (en) Motor