JPS5386581A - Producton of mesa type diode - Google Patents

Producton of mesa type diode

Info

Publication number
JPS5386581A
JPS5386581A JP78477A JP78477A JPS5386581A JP S5386581 A JPS5386581 A JP S5386581A JP 78477 A JP78477 A JP 78477A JP 78477 A JP78477 A JP 78477A JP S5386581 A JPS5386581 A JP S5386581A
Authority
JP
Japan
Prior art keywords
producton
mesa
mesa type
type diode
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP78477A
Other languages
Japanese (ja)
Inventor
Katsuya Okumura
Kazuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP78477A priority Critical patent/JPS5386581A/en
Publication of JPS5386581A publication Critical patent/JPS5386581A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To produce MESA type diodes by beforehand anodic-oxidizing the portions to be mesa etched, leaving the mesa electrode portions without anodicoxidizing and etching an oxide film after selectively covering a metal film.
COPYRIGHT: (C)1978,JPO&Japio
JP78477A 1977-01-10 1977-01-10 Producton of mesa type diode Pending JPS5386581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP78477A JPS5386581A (en) 1977-01-10 1977-01-10 Producton of mesa type diode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP78477A JPS5386581A (en) 1977-01-10 1977-01-10 Producton of mesa type diode

Publications (1)

Publication Number Publication Date
JPS5386581A true JPS5386581A (en) 1978-07-31

Family

ID=11483315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP78477A Pending JPS5386581A (en) 1977-01-10 1977-01-10 Producton of mesa type diode

Country Status (1)

Country Link
JP (1) JPS5386581A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168246A (en) * 1985-01-21 1986-07-29 Rohm Co Ltd Mesa type diode element
JP2006060055A (en) * 2004-08-20 2006-03-02 New Japan Radio Co Ltd Method for manufacturing silicon carbide impatt diode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168246A (en) * 1985-01-21 1986-07-29 Rohm Co Ltd Mesa type diode element
JP2006060055A (en) * 2004-08-20 2006-03-02 New Japan Radio Co Ltd Method for manufacturing silicon carbide impatt diode

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