JPS54108577A - Glass coating method of semiconductor element - Google Patents
Glass coating method of semiconductor elementInfo
- Publication number
- JPS54108577A JPS54108577A JP1523378A JP1523378A JPS54108577A JP S54108577 A JPS54108577 A JP S54108577A JP 1523378 A JP1523378 A JP 1523378A JP 1523378 A JP1523378 A JP 1523378A JP S54108577 A JPS54108577 A JP S54108577A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- glass powder
- compound
- dispersed
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title abstract 10
- 238000000576 coating method Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000843 powder Substances 0.000 abstract 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 abstract 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- 239000002659 electrodeposit Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 150000002576 ketones Chemical class 0.000 abstract 1
- YXEUGTSPQFTXTR-UHFFFAOYSA-K lanthanum(3+);trihydroxide Chemical compound [OH-].[OH-].[OH-].[La+3] YXEUGTSPQFTXTR-UHFFFAOYSA-K 0.000 abstract 1
- FYDKNKUEBJQCCN-UHFFFAOYSA-N lanthanum(3+);trinitrate Chemical compound [La+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O FYDKNKUEBJQCCN-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 150000002894 organic compounds Chemical class 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To electrodeposit any kind of glass easily by using a glass-dispersed solution obtained by adding a La compound to powdery glass.
CONSTITUTION: Zinc borate based glass powder is dispersed in isopropyl alcohol and lanthanum nitrate is dissolved at a rate of 1 x 10-5 to 2 x 10-3 mole per gram of glass. In this solution, glass powder is electrodeposited on the fixed surface of a Si element with a platinum electrode connected to the positive pole and heated to obtain a glass coating. In general, this glass powder uses any kind of one for semiconductor coating. Its medium may use a group of ketone in addition to ethanol. As a La compound, an organic compound may be used. In this method, La ions becomes lanthanum hydroxide and is deposited among glass powder particles to form a strong film. As a result, a current is cut off to prevent local concentration and glass powder moves into a deep bevel groove, so that it can be filled.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1523378A JPS54108577A (en) | 1978-02-13 | 1978-02-13 | Glass coating method of semiconductor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1523378A JPS54108577A (en) | 1978-02-13 | 1978-02-13 | Glass coating method of semiconductor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54108577A true JPS54108577A (en) | 1979-08-25 |
Family
ID=11883138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1523378A Pending JPS54108577A (en) | 1978-02-13 | 1978-02-13 | Glass coating method of semiconductor element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54108577A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112366229A (en) * | 2020-11-30 | 2021-02-12 | 江苏吉莱微电子股份有限公司 | Novel mesa structure chip structure and PN terminal surface glass passivation manufacturing process |
-
1978
- 1978-02-13 JP JP1523378A patent/JPS54108577A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112366229A (en) * | 2020-11-30 | 2021-02-12 | 江苏吉莱微电子股份有限公司 | Novel mesa structure chip structure and PN terminal surface glass passivation manufacturing process |
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