JPS54116894A - Superconduction circuit device - Google Patents

Superconduction circuit device

Info

Publication number
JPS54116894A
JPS54116894A JP2410678A JP2410678A JPS54116894A JP S54116894 A JPS54116894 A JP S54116894A JP 2410678 A JP2410678 A JP 2410678A JP 2410678 A JP2410678 A JP 2410678A JP S54116894 A JPS54116894 A JP S54116894A
Authority
JP
Japan
Prior art keywords
layer
substrate
sio
desirable
superconduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2410678A
Other languages
Japanese (ja)
Other versions
JPS5622383B2 (en
Inventor
Hajime Yamada
Akira Ishida
Kenichi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2410678A priority Critical patent/JPS54116894A/en
Publication of JPS54116894A publication Critical patent/JPS54116894A/en
Publication of JPS5622383B2 publication Critical patent/JPS5622383B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE: To eliminate the peeling off of a substrate by stacking a Nb layer and SiO2 layer on the substrate of glass, etc., via a Cr layer and then by forming a desirable superconduction circuit device on it.
CONSTITUTION: Substrate 1 uses Si, SiO2 glass and sapphire. By sputtering, Cr13, superconductive earth surface layer 2 of Nb, and SiO23 are stacked sequentially on the substrate. Since the Cr layer adheres to substrate 1 and the Nb layer with extremely good contact, it is hard to peel off, so that when layer 2 is etched to form a desirable pattern, it will not peel off. In addition, Cr is of large resistance against an etching solution for Nb, and the desirable superconduction device can be manufactured at high yield.
COPYRIGHT: (C)1979,JPO&Japio
JP2410678A 1978-03-03 1978-03-03 Superconduction circuit device Granted JPS54116894A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2410678A JPS54116894A (en) 1978-03-03 1978-03-03 Superconduction circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2410678A JPS54116894A (en) 1978-03-03 1978-03-03 Superconduction circuit device

Publications (2)

Publication Number Publication Date
JPS54116894A true JPS54116894A (en) 1979-09-11
JPS5622383B2 JPS5622383B2 (en) 1981-05-25

Family

ID=12129081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2410678A Granted JPS54116894A (en) 1978-03-03 1978-03-03 Superconduction circuit device

Country Status (1)

Country Link
JP (1) JPS54116894A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979584A (en) * 1982-10-29 1984-05-08 Hitachi Ltd Josefson integrated circuit resistors
US5057877A (en) * 1989-08-31 1991-10-15 At&T Bell Laboratories Superconductor interconnection apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5979584A (en) * 1982-10-29 1984-05-08 Hitachi Ltd Josefson integrated circuit resistors
US5057877A (en) * 1989-08-31 1991-10-15 At&T Bell Laboratories Superconductor interconnection apparatus

Also Published As

Publication number Publication date
JPS5622383B2 (en) 1981-05-25

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