JPS54130882A - Method of inspecting semiconductor surface - Google Patents

Method of inspecting semiconductor surface

Info

Publication number
JPS54130882A
JPS54130882A JP3813278A JP3813278A JPS54130882A JP S54130882 A JPS54130882 A JP S54130882A JP 3813278 A JP3813278 A JP 3813278A JP 3813278 A JP3813278 A JP 3813278A JP S54130882 A JPS54130882 A JP S54130882A
Authority
JP
Japan
Prior art keywords
semiconductor surface
inspecting semiconductor
inspecting
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3813278A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP3813278A priority Critical patent/JPS54130882A/en
Publication of JPS54130882A publication Critical patent/JPS54130882A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3813278A 1978-04-03 1978-04-03 Method of inspecting semiconductor surface Pending JPS54130882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3813278A JPS54130882A (en) 1978-04-03 1978-04-03 Method of inspecting semiconductor surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3813278A JPS54130882A (en) 1978-04-03 1978-04-03 Method of inspecting semiconductor surface

Publications (1)

Publication Number Publication Date
JPS54130882A true JPS54130882A (en) 1979-10-11

Family

ID=12516904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3813278A Pending JPS54130882A (en) 1978-04-03 1978-04-03 Method of inspecting semiconductor surface

Country Status (1)

Country Link
JP (1) JPS54130882A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773228U (en) * 1980-10-23 1982-05-06
JPS5775439A (en) * 1980-10-30 1982-05-12 Oki Electric Ind Co Ltd Judgement of stability of semiconductor device
US5635410A (en) * 1994-07-25 1997-06-03 Dainippon Screen Manufacturing Co., Ltd. Bias temperature treatment method
JP2003347381A (en) * 2002-05-24 2003-12-05 Semiconductor Leading Edge Technologies Inc Film quality evaluating method for low dielectric constant film and method of manufacturing semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773228U (en) * 1980-10-23 1982-05-06
JPS5775439A (en) * 1980-10-30 1982-05-12 Oki Electric Ind Co Ltd Judgement of stability of semiconductor device
US5635410A (en) * 1994-07-25 1997-06-03 Dainippon Screen Manufacturing Co., Ltd. Bias temperature treatment method
JP2003347381A (en) * 2002-05-24 2003-12-05 Semiconductor Leading Edge Technologies Inc Film quality evaluating method for low dielectric constant film and method of manufacturing semiconductor device

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