JPS541684A - Operation checking device of defect inspecting apparatus - Google Patents

Operation checking device of defect inspecting apparatus

Info

Publication number
JPS541684A
JPS541684A JP6719877A JP6719877A JPS541684A JP S541684 A JPS541684 A JP S541684A JP 6719877 A JP6719877 A JP 6719877A JP 6719877 A JP6719877 A JP 6719877A JP S541684 A JPS541684 A JP S541684A
Authority
JP
Japan
Prior art keywords
defect
inspecting apparatus
checking device
defect inspecting
operation checking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6719877A
Other languages
Japanese (ja)
Other versions
JPS5920973B2 (en
Inventor
Katsuumi Koyanagi
Kenji Ogino
Toshio Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP6719877A priority Critical patent/JPS5920973B2/en
Publication of JPS541684A publication Critical patent/JPS541684A/en
Publication of JPS5920973B2 publication Critical patent/JPS5920973B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To let the formation inspection itself be check operation for a defect inspecting apparatus by making the outputs of defect detectors which perform defect detection by relatively moving at the level at which only the defect detecting signals are drawn out and at the level at which formation detecting signals may also be drawn out.
JP6719877A 1977-06-06 1977-06-06 Operation confirmation device for defect detection device Expired JPS5920973B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6719877A JPS5920973B2 (en) 1977-06-06 1977-06-06 Operation confirmation device for defect detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6719877A JPS5920973B2 (en) 1977-06-06 1977-06-06 Operation confirmation device for defect detection device

Publications (2)

Publication Number Publication Date
JPS541684A true JPS541684A (en) 1979-01-08
JPS5920973B2 JPS5920973B2 (en) 1984-05-16

Family

ID=13337958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6719877A Expired JPS5920973B2 (en) 1977-06-06 1977-06-06 Operation confirmation device for defect detection device

Country Status (1)

Country Link
JP (1) JPS5920973B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0469371A (en) * 1990-07-10 1992-03-04 Nippon Zeon Co Ltd Purification of dimethylformamide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0469371A (en) * 1990-07-10 1992-03-04 Nippon Zeon Co Ltd Purification of dimethylformamide

Also Published As

Publication number Publication date
JPS5920973B2 (en) 1984-05-16

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