JPS5421265A - Forming method of semiconductor oxide film - Google Patents

Forming method of semiconductor oxide film

Info

Publication number
JPS5421265A
JPS5421265A JP8680577A JP8680577A JPS5421265A JP S5421265 A JPS5421265 A JP S5421265A JP 8680577 A JP8680577 A JP 8680577A JP 8680577 A JP8680577 A JP 8680577A JP S5421265 A JPS5421265 A JP S5421265A
Authority
JP
Japan
Prior art keywords
oxide film
forming method
semiconductor oxide
oxidation
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8680577A
Other languages
English (en)
Other versions
JPS6151416B2 (ja
Inventor
Natsuo Tsubouchi
Kuniaki Miyake
Hirokazu Miyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8680577A priority Critical patent/JPS5421265A/ja
Publication of JPS5421265A publication Critical patent/JPS5421265A/ja
Publication of JPS6151416B2 publication Critical patent/JPS6151416B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP8680577A 1977-07-19 1977-07-19 Forming method of semiconductor oxide film Granted JPS5421265A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8680577A JPS5421265A (en) 1977-07-19 1977-07-19 Forming method of semiconductor oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8680577A JPS5421265A (en) 1977-07-19 1977-07-19 Forming method of semiconductor oxide film

Publications (2)

Publication Number Publication Date
JPS5421265A true JPS5421265A (en) 1979-02-17
JPS6151416B2 JPS6151416B2 (ja) 1986-11-08

Family

ID=13897007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8680577A Granted JPS5421265A (en) 1977-07-19 1977-07-19 Forming method of semiconductor oxide film

Country Status (1)

Country Link
JP (1) JPS5421265A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55140234A (en) * 1979-04-19 1980-11-01 Nec Kyushu Ltd Method of forming oxide film by heating
JPS591003U (ja) * 1982-06-28 1984-01-06 株式会社町田製作所 レ−ザ−用導光路
JPS59154404A (ja) * 1983-02-21 1984-09-03 Furukawa Electric Co Ltd:The パイプ被覆光フアイバとその端末処理方法
JPS59227128A (ja) * 1983-06-08 1984-12-20 Hitachi Ltd 半導体基体の酸化法
JPS60124882A (ja) * 1983-12-09 1985-07-03 Agency Of Ind Science & Technol 太陽電池の製造方法
JPS60201309A (ja) * 1984-03-26 1985-10-11 Sumitomo Electric Ind Ltd 光フアイバ心線
JPS60205517A (ja) * 1984-03-30 1985-10-17 Fujikura Ltd 光フアイバ心線およびその製法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50150373A (ja) * 1974-05-22 1975-12-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50150373A (ja) * 1974-05-22 1975-12-02

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55140234A (en) * 1979-04-19 1980-11-01 Nec Kyushu Ltd Method of forming oxide film by heating
JPS591003U (ja) * 1982-06-28 1984-01-06 株式会社町田製作所 レ−ザ−用導光路
JPS59154404A (ja) * 1983-02-21 1984-09-03 Furukawa Electric Co Ltd:The パイプ被覆光フアイバとその端末処理方法
JPS59227128A (ja) * 1983-06-08 1984-12-20 Hitachi Ltd 半導体基体の酸化法
JPS60124882A (ja) * 1983-12-09 1985-07-03 Agency Of Ind Science & Technol 太陽電池の製造方法
JPS60201309A (ja) * 1984-03-26 1985-10-11 Sumitomo Electric Ind Ltd 光フアイバ心線
JPS60205517A (ja) * 1984-03-30 1985-10-17 Fujikura Ltd 光フアイバ心線およびその製法

Also Published As

Publication number Publication date
JPS6151416B2 (ja) 1986-11-08

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