JPS542185A - Leakage detector of corrosive gas - Google Patents

Leakage detector of corrosive gas

Info

Publication number
JPS542185A
JPS542185A JP6624277A JP6624277A JPS542185A JP S542185 A JPS542185 A JP S542185A JP 6624277 A JP6624277 A JP 6624277A JP 6624277 A JP6624277 A JP 6624277A JP S542185 A JPS542185 A JP S542185A
Authority
JP
Japan
Prior art keywords
corrosive gas
leakage detector
leakage
corrosive
detecting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6624277A
Other languages
Japanese (ja)
Inventor
Toyohiko Horikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6624277A priority Critical patent/JPS542185A/en
Publication of JPS542185A publication Critical patent/JPS542185A/en
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)

Abstract

PURPOSE: To enable leakage detection of corrosive gas to be performed rapidly by using the substance readily corroded by corrosive gas in a leakage detecting element.
COPYRIGHT: (C)1979,JPO&Japio
JP6624277A 1977-06-07 1977-06-07 Leakage detector of corrosive gas Pending JPS542185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6624277A JPS542185A (en) 1977-06-07 1977-06-07 Leakage detector of corrosive gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6624277A JPS542185A (en) 1977-06-07 1977-06-07 Leakage detector of corrosive gas

Publications (1)

Publication Number Publication Date
JPS542185A true JPS542185A (en) 1979-01-09

Family

ID=13310189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6624277A Pending JPS542185A (en) 1977-06-07 1977-06-07 Leakage detector of corrosive gas

Country Status (1)

Country Link
JP (1) JPS542185A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016118529A (en) * 2014-09-17 2016-06-30 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ Corrosion sensor retainer assembly, gas block, vacuum chamber, and method for predicting corrosion
JP2019523872A (en) * 2016-06-06 2019-08-29 ヘキサゴン テクノロジー アーエス Series cycle fuse

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016118529A (en) * 2014-09-17 2016-06-30 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ Corrosion sensor retainer assembly, gas block, vacuum chamber, and method for predicting corrosion
JP2019523872A (en) * 2016-06-06 2019-08-29 ヘキサゴン テクノロジー アーエス Series cycle fuse

Similar Documents

Publication Publication Date Title
JPS53108488A (en) Flaw detector for tubes
JPS53110881A (en) Temperature detector
JPS53135375A (en) Liquid metal leakage detector
JPS5211974A (en) Liquid metal leak detector
JPS5256996A (en) Inflammable gas detecting element
JPS5211975A (en) Supersonic flaw detector
JPS52125387A (en) Surface flaw detecting method of hot steel materials
JPS51135474A (en) To analyze a semiconductor device
JPS5434698A (en) Warning device for gas leak
JPS5223993A (en) Gas detecting element
JPS53133492A (en) Inflammable gas detector
JPS51141600A (en) Fire detecting equipment
JPS52108877A (en) Apparatus for use with mass spectrometer for automatically detecting a nd setting peak-top of mass number
JPS51141684A (en) Automatic flaw detector
JPS5364191A (en) Radioactivity monitor
JPS51141649A (en) Detecting apparatus for focus matching
JPS53142299A (en) Detecting method of nitrogen compounds
JPS52106446A (en) Absent phase detector
JPS52129899A (en) Broken fuel detecting method
JPS5350883A (en) Sodium leakage detector
JPS51127752A (en) Seam detecting method
JPS51145392A (en) Device for detecting conductivity of water medium
JPS5383792A (en) Combustible gas detective element
JPS5286555A (en) Inter-liquid interface detector in a direct contact type liquid-liquid heat exchanger
JPS5364568A (en) Detecting method for variation