JPS5423480A - Manufacture for mis type semiconductor element - Google Patents

Manufacture for mis type semiconductor element

Info

Publication number
JPS5423480A
JPS5423480A JP8843877A JP8843877A JPS5423480A JP S5423480 A JPS5423480 A JP S5423480A JP 8843877 A JP8843877 A JP 8843877A JP 8843877 A JP8843877 A JP 8843877A JP S5423480 A JPS5423480 A JP S5423480A
Authority
JP
Japan
Prior art keywords
manufacture
type semiconductor
semiconductor element
mis type
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8843877A
Other languages
Japanese (ja)
Inventor
Ken Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP8843877A priority Critical patent/JPS5423480A/en
Publication of JPS5423480A publication Critical patent/JPS5423480A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To reduce the gate capacitance caused due to the duplication of the gate region and the source and drain regions, by forming the source and drain regions after smoothing the lift up parts at the both ends of gate Si layer formed via the oxide film on a semiconductor substrate with etching.
COPYRIGHT: (C)1979,JPO&Japio
JP8843877A 1977-07-25 1977-07-25 Manufacture for mis type semiconductor element Pending JPS5423480A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8843877A JPS5423480A (en) 1977-07-25 1977-07-25 Manufacture for mis type semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8843877A JPS5423480A (en) 1977-07-25 1977-07-25 Manufacture for mis type semiconductor element

Publications (1)

Publication Number Publication Date
JPS5423480A true JPS5423480A (en) 1979-02-22

Family

ID=13942793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8843877A Pending JPS5423480A (en) 1977-07-25 1977-07-25 Manufacture for mis type semiconductor element

Country Status (1)

Country Link
JP (1) JPS5423480A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51100681A (en) * 1975-03-03 1976-09-06 Nippon Electric Co ZETSUENBUTSUGEETODENKAIKOKATORANJISUTA
JPS5215273A (en) * 1975-07-28 1977-02-04 Hitachi Ltd Semiconductor device
JPS5326683A (en) * 1976-08-25 1978-03-11 Hitachi Ltd Manufacture of semiconductor devic e

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51100681A (en) * 1975-03-03 1976-09-06 Nippon Electric Co ZETSUENBUTSUGEETODENKAIKOKATORANJISUTA
JPS5215273A (en) * 1975-07-28 1977-02-04 Hitachi Ltd Semiconductor device
JPS5326683A (en) * 1976-08-25 1978-03-11 Hitachi Ltd Manufacture of semiconductor devic e

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