JPS5263682A - Production of mesa type transistor - Google Patents

Production of mesa type transistor

Info

Publication number
JPS5263682A
JPS5263682A JP50139822A JP13982275A JPS5263682A JP S5263682 A JPS5263682 A JP S5263682A JP 50139822 A JP50139822 A JP 50139822A JP 13982275 A JP13982275 A JP 13982275A JP S5263682 A JPS5263682 A JP S5263682A
Authority
JP
Japan
Prior art keywords
production
type transistor
mesa type
sio
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50139822A
Other languages
Japanese (ja)
Other versions
JPS5722224B2 (en
Inventor
Kenji Hirakawa
Tamikazu Hosoi
Koji Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP50139822A priority Critical patent/JPS5263682A/en
Publication of JPS5263682A publication Critical patent/JPS5263682A/en
Publication of JPS5722224B2 publication Critical patent/JPS5722224B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To reduce surface leak current by simultaneously performing second mesa etching with the SiO2 film on the surface as a mask and etching to an emitter-base junction for the transistor element portion having undergone mesa etching, then removing the SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
JP50139822A 1975-11-20 1975-11-20 Production of mesa type transistor Granted JPS5263682A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50139822A JPS5263682A (en) 1975-11-20 1975-11-20 Production of mesa type transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50139822A JPS5263682A (en) 1975-11-20 1975-11-20 Production of mesa type transistor

Publications (2)

Publication Number Publication Date
JPS5263682A true JPS5263682A (en) 1977-05-26
JPS5722224B2 JPS5722224B2 (en) 1982-05-12

Family

ID=15254266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50139822A Granted JPS5263682A (en) 1975-11-20 1975-11-20 Production of mesa type transistor

Country Status (1)

Country Link
JP (1) JPS5263682A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379470A (en) * 1976-12-24 1978-07-13 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS5726465A (en) * 1980-07-24 1982-02-12 Toshiba Corp Semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169816U (en) * 1984-04-17 1985-11-11 三菱電機株式会社 Oil-filled electromagnetic induction device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS432115Y1 (en) * 1964-07-17 1968-01-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS432115Y1 (en) * 1964-07-17 1968-01-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379470A (en) * 1976-12-24 1978-07-13 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS5726465A (en) * 1980-07-24 1982-02-12 Toshiba Corp Semiconductor device

Also Published As

Publication number Publication date
JPS5722224B2 (en) 1982-05-12

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