JPS5425665A - Reactor core tube - Google Patents

Reactor core tube

Info

Publication number
JPS5425665A
JPS5425665A JP9125377A JP9125377A JPS5425665A JP S5425665 A JPS5425665 A JP S5425665A JP 9125377 A JP9125377 A JP 9125377A JP 9125377 A JP9125377 A JP 9125377A JP S5425665 A JPS5425665 A JP S5425665A
Authority
JP
Japan
Prior art keywords
core tube
reactor core
exhaust
grooves
abnormity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9125377A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9125377A priority Critical patent/JPS5425665A/en
Publication of JPS5425665A publication Critical patent/JPS5425665A/en
Pending legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To block the occurrence of abnormity on the semiconductor wafer surface diffused, by forming grooves near the exhaust grooves of a reactor core tube having gas inlet at one end and gas discharge outlet at another end and by containing the liquid material stored near the exhaust outlet in it.
COPYRIGHT: (C)1979,JPO&Japio
JP9125377A 1977-07-28 1977-07-28 Reactor core tube Pending JPS5425665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9125377A JPS5425665A (en) 1977-07-28 1977-07-28 Reactor core tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9125377A JPS5425665A (en) 1977-07-28 1977-07-28 Reactor core tube

Publications (1)

Publication Number Publication Date
JPS5425665A true JPS5425665A (en) 1979-02-26

Family

ID=14021249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9125377A Pending JPS5425665A (en) 1977-07-28 1977-07-28 Reactor core tube

Country Status (1)

Country Link
JP (1) JPS5425665A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217832U (en) * 1988-07-20 1990-02-06
JPH04252024A (en) * 1991-01-28 1992-09-08 Nec Yamagata Ltd Semiconductor manufacturing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217832U (en) * 1988-07-20 1990-02-06
JPH04252024A (en) * 1991-01-28 1992-09-08 Nec Yamagata Ltd Semiconductor manufacturing apparatus

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