JPH0217832U - - Google Patents
Info
- Publication number
- JPH0217832U JPH0217832U JP9623188U JP9623188U JPH0217832U JP H0217832 U JPH0217832 U JP H0217832U JP 9623188 U JP9623188 U JP 9623188U JP 9623188 U JP9623188 U JP 9623188U JP H0217832 U JPH0217832 U JP H0217832U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- furnace core
- diffusion
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Furnace Details (AREA)
Description
第１図は、この考案の一実施例に係る炉芯管の
適用される拡散炉を説明する図、第２図は、同炉
芯管チユーブの外観斜視図、第３図は、同チユー
ブの変形例を示す外観斜視図、第４図は、従来の
炉芯管の断面図、第５図は、同従来の炉芯管が適
用される拡散炉を説明する図である。
１：炉芯管、２：チユーブ、２ａ：チユーブ内
壁、２ｂ：溝部、３：キヤツプ、３ｂ：液排出口
、４：電気炉、６：ボート、Ｗ：ウエハ。
FIG. 1 is a diagram illustrating a diffusion furnace to which a furnace core tube according to an embodiment of the invention is applied, FIG. 2 is an external perspective view of the furnace core tube, and FIG. 3 is a diagram of the tube. FIG. 4 is a sectional view of a conventional furnace core tube, and FIG. 5 is a diagram illustrating a diffusion furnace to which the conventional furnace core tube is applied. 1: furnace core tube, 2: tube, 2a: tube inner wall, 2b: groove, 3: cap, 3b: liquid outlet, 4: electric furnace, 6: boat, W: wafer.
Claims (1)
トが収納されると共に、不純物を含むキヤリアガ
スが流される拡散炉の炉芯管において、 炉芯管内壁底部には、炉芯管軸方向に延伸する
溝部が形成されると共に、この溝部内の液体を排
出する液排出口を備えたことを特徴とする拡散炉
の炉芯管。[Scope of Claim for Utility Model Registration] In the core tube of a diffusion furnace, which is inserted into the furnace and houses a boat supporting wafers therein, and through which a carrier gas containing impurities is flowed, the bottom of the inner wall of the furnace core tube contains: A furnace core tube for a diffusion furnace, characterized in that a groove extending in the axial direction of the furnace core tube is formed and a liquid discharge port for discharging the liquid in the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9623188U JPH0217832U (en) | 1988-07-20 | 1988-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9623188U JPH0217832U (en) | 1988-07-20 | 1988-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217832U true JPH0217832U (en) | 1990-02-06 |
Family
ID=31321087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9623188U Pending JPH0217832U (en) | 1988-07-20 | 1988-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217832U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425665A (en) * | 1977-07-28 | 1979-02-26 | Nec Corp | Reactor core tube |
| JPS6150330A (en) * | 1984-08-20 | 1986-03-12 | Oki Electric Ind Co Ltd | Cleaning method for diffusion furnace |
-
1988
- 1988-07-20 JP JP9623188U patent/JPH0217832U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425665A (en) * | 1977-07-28 | 1979-02-26 | Nec Corp | Reactor core tube |
| JPS6150330A (en) * | 1984-08-20 | 1986-03-12 | Oki Electric Ind Co Ltd | Cleaning method for diffusion furnace |
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