JPS542668A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS542668A
JPS542668A JP6821977A JP6821977A JPS542668A JP S542668 A JPS542668 A JP S542668A JP 6821977 A JP6821977 A JP 6821977A JP 6821977 A JP6821977 A JP 6821977A JP S542668 A JPS542668 A JP S542668A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
positioning
substrate
photo mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6821977A
Other languages
Japanese (ja)
Inventor
Junichi Mihashi
Takayuki Matsukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6821977A priority Critical patent/JPS542668A/en
Publication of JPS542668A publication Critical patent/JPS542668A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To improve matching precision by providing positioning patterns to a substrate and photo mask and by generating moire stripes through positioning.
COPYRIGHT: (C)1979,JPO&Japio
JP6821977A 1977-06-08 1977-06-08 Manufacture of semiconductor device Pending JPS542668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6821977A JPS542668A (en) 1977-06-08 1977-06-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6821977A JPS542668A (en) 1977-06-08 1977-06-08 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS542668A true JPS542668A (en) 1979-01-10

Family

ID=13367463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6821977A Pending JPS542668A (en) 1977-06-08 1977-06-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS542668A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012273A (en) * 1986-05-12 1991-04-30 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter type of camera including zoom lens
US5016032A (en) * 1986-05-12 1991-05-14 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5142315A (en) * 1986-05-12 1992-08-25 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter type of camera including zoom lens
US5150145A (en) * 1986-05-12 1992-09-22 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5157429A (en) * 1986-05-12 1992-10-20 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5276475A (en) * 1986-05-12 1994-01-04 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5475456A (en) * 1986-05-12 1995-12-12 Asahi Kogaku Kogyo Kabushiki Kaisha Zoom lens drive system for lens shutter type of camera

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012273A (en) * 1986-05-12 1991-04-30 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter type of camera including zoom lens
US5016032A (en) * 1986-05-12 1991-05-14 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5142315A (en) * 1986-05-12 1992-08-25 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter type of camera including zoom lens
US5150145A (en) * 1986-05-12 1992-09-22 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5157429A (en) * 1986-05-12 1992-10-20 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5264885A (en) * 1986-05-12 1993-11-23 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5276475A (en) * 1986-05-12 1994-01-04 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5321462A (en) * 1986-05-12 1994-06-14 Asahi Kogaku Kogyo Kabushiki Kaisha Lens shutter camera including zoom lens
US5475456A (en) * 1986-05-12 1995-12-12 Asahi Kogaku Kogyo Kabushiki Kaisha Zoom lens drive system for lens shutter type of camera
US5897227A (en) * 1986-05-12 1999-04-27 Asahi Kogaku Kogyo Kabushiki Kaisha Zoom lens drive system for lens shutter type of camera

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