JPS545659A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS545659A
JPS545659A JP7128877A JP7128877A JPS545659A JP S545659 A JPS545659 A JP S545659A JP 7128877 A JP7128877 A JP 7128877A JP 7128877 A JP7128877 A JP 7128877A JP S545659 A JPS545659 A JP S545659A
Authority
JP
Japan
Prior art keywords
film
manufacture
semiconductor device
installetion
lift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7128877A
Other languages
Japanese (ja)
Inventor
Hiroshi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7128877A priority Critical patent/JPS545659A/en
Publication of JPS545659A publication Critical patent/JPS545659A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To facilitate an easy formation of a minute pattern composed of a thick metal film by having a lift-off with installetion twice of the mask of the photo resist film when forming a metal electrode film onto the semiconductor substrate via an insulator film.
COPYRIGHT: (C)1979,JPO&Japio
JP7128877A 1977-06-15 1977-06-15 Manufacture of semiconductor device Pending JPS545659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7128877A JPS545659A (en) 1977-06-15 1977-06-15 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7128877A JPS545659A (en) 1977-06-15 1977-06-15 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS545659A true JPS545659A (en) 1979-01-17

Family

ID=13456352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7128877A Pending JPS545659A (en) 1977-06-15 1977-06-15 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS545659A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6199199A (en) * 1984-09-28 1986-05-17 株式会社東芝 Voice analyzer/synthesizer
JP2012064945A (en) * 2010-09-20 2012-03-29 Toshiba Corp Semiconductor device and method for manufacturing the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509549A (en) * 1973-05-30 1975-01-31
JPS5038059A (en) * 1973-07-31 1975-04-09
JPS5224478A (en) * 1975-08-20 1977-02-23 Matsushita Electric Ind Co Ltd Semiconductor device manufacturing process

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509549A (en) * 1973-05-30 1975-01-31
JPS5038059A (en) * 1973-07-31 1975-04-09
JPS5224478A (en) * 1975-08-20 1977-02-23 Matsushita Electric Ind Co Ltd Semiconductor device manufacturing process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6199199A (en) * 1984-09-28 1986-05-17 株式会社東芝 Voice analyzer/synthesizer
JP2012064945A (en) * 2010-09-20 2012-03-29 Toshiba Corp Semiconductor device and method for manufacturing the same

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