JPS542675A - Exposure device - Google Patents

Exposure device

Info

Publication number
JPS542675A
JPS542675A JP6828177A JP6828177A JPS542675A JP S542675 A JPS542675 A JP S542675A JP 6828177 A JP6828177 A JP 6828177A JP 6828177 A JP6828177 A JP 6828177A JP S542675 A JPS542675 A JP S542675A
Authority
JP
Japan
Prior art keywords
exposure device
photo mask
exposure
curving
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6828177A
Other languages
Japanese (ja)
Inventor
Hiroshi Koshimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6828177A priority Critical patent/JPS542675A/en
Publication of JPS542675A publication Critical patent/JPS542675A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To make an exposure possible without curving a photo mask, by providing a method which applies fixed pressure of air to the non-pattern formation surface of the photo mask supported by the support desk of an exposure device.
COPYRIGHT: (C)1979,JPO&Japio
JP6828177A 1977-06-08 1977-06-08 Exposure device Pending JPS542675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6828177A JPS542675A (en) 1977-06-08 1977-06-08 Exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6828177A JPS542675A (en) 1977-06-08 1977-06-08 Exposure device

Publications (1)

Publication Number Publication Date
JPS542675A true JPS542675A (en) 1979-01-10

Family

ID=13369214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6828177A Pending JPS542675A (en) 1977-06-08 1977-06-08 Exposure device

Country Status (1)

Country Link
JP (1) JPS542675A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015038982A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Holding device and contact exposure device and proximity exposure device of substrate
JP2015038981A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Contact exposure system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015038982A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Holding device and contact exposure device and proximity exposure device of substrate
JP2015038981A (en) * 2013-07-18 2015-02-26 Ｎｓｋテクノロジー株式会社 Contact exposure system

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