JPS5432068A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number: JPS5432068A
Authority: JP; Japan
Prior art keywords: manufacture; semiconductor device; etching; iwth; course
Prior art date: 1977-08-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP9777577A

Other languages

English (en)

Inventor

Kazufumi Nakamura

Eiji Hashimoto

Sunao Nishimuro

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Oki Electric Industry Co Ltd

Original Assignee

Oki Electric Industry Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-08-17

Filing date

1977-08-17

Publication date

1979-03-09

1977-08-17 Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd

1977-08-17 Priority to JP9777577A priority Critical patent/JPS5432068A/ja

1979-03-09 Publication of JPS5432068A publication Critical patent/JPS5432068A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
238000005530 etching Methods 0.000 abstract 3
230000015572 biosynthetic process Effects 0.000 abstract 1
239000011248 coating agent Substances 0.000 abstract 1
238000000576 coating method Methods 0.000 abstract 1
238000005259 measurement Methods 0.000 abstract 1
229920002120 photoresistant polymer Polymers 0.000 abstract 1

Landscapes

Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Weting (AREA)

JP9777577A 1977-08-17 1977-08-17 Manufacture of semiconductor device Pending JPS5432068A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP9777577A JPS5432068A (en)	1977-08-17	1977-08-17	Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP9777577A JPS5432068A (en)	1977-08-17	1977-08-17	Manufacture of semiconductor device

Publications (1)

Publication Number	Publication Date
JPS5432068A true JPS5432068A (en)	1979-03-09

Family

ID=14201204

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP9777577A Pending JPS5432068A (en)	1977-08-17	1977-08-17	Manufacture of semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS5432068A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS56164530A (en) *	1980-05-22	1981-12-17	Sanyo Electric Co Ltd	Formation of contacting hole of semiconductor device
JPS5854631A (ja) *	1981-09-28	1983-03-31	Nec Corp	半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4949267A (ja) *	1972-09-16	1974-05-13

1977
- 1977-08-17 JP JP9777577A patent/JPS5432068A/ja active Pending

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS4949267A (ja) *	1972-09-16	1974-05-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS56164530A (en) *	1980-05-22	1981-12-17	Sanyo Electric Co Ltd	Formation of contacting hole of semiconductor device
JPS5854631A (ja) *	1981-09-28	1983-03-31	Nec Corp	半導体装置の製造方法

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